Formation of indium tin oxide film by wet process using laser sintering

被引:31
作者
Qin, Gang [1 ,2 ]
Fan, Lidan [3 ]
Watanabe, Akira [1 ]
机构
[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Sendai, Miyagi 9808577, Japan
[2] Henan Polytech Univ, Sch Mat Sci & Engn, Jiaozuo 454001, Peoples R China
[3] Henan Polytech Univ, Sch Civil Engn, Jiaozuo 454001, Peoples R China
关键词
ITO films; ITO micropatterns; Nanoparticles; Laser sintering; Laser direct writing; ITO THIN-FILMS; TRANSPARENT; METAL; NANOPARTICLES; FABRICATION;
D O I
10.1016/j.jmatprotec.2015.07.011
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Indium tin oxide (ITO) films were prepared via a very simple and low-cost preparation technique based on a wet process using a continuous wave (CW) laser and an indium tin (In-Sn) alloy nanoparticle ink. The formation of continuous transparent conductive films using a laser sintering method and micropatterning of the ITO films using a laser direct writing method were investigated. This process is simpler than the conventional two-step heat treatment method and other wet processes that use ITO nanoparticles as starting materials. In addition, the optical and electrical properties of the ITO films were improved. Notably, the conductivity and transmittance were remarkably influenced by the processing parameters, including the laser power and scan speed. Suitable processing conditions were thus investigated and optimized, and ITO micropattems with accurate linear and sharp edge profiles were obtained by controlling the laser power and focusing conditions in the laser direct writing process. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:16 / 23
页数:8
相关论文
共 27 条
[1]   Characteristics of ITO-resistive touch film deposited on a PET substrate by in-line DC magnetron sputtering [J].
Ahn, Min Hyung ;
Cho, Eou Sik ;
Kwon, Sang Jik .
VACUUM, 2014, 101 :221-227
[2]   Enhancement of the optical and electrical properties of ITO thin films deposited by electron beam evaporation technique [J].
Ali, HM ;
Mohamed, HA ;
Mohamed, SH .
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2005, 31 (02) :87-93
[3]   Fabrication of silver microwiring on a double-decker-shaped polysilsesquioxane film by laser direct writing [J].
Aminuzzaman, Mohammod ;
Watanabe, Akira ;
Miyashita, Tokuji .
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2008, 21 (04) :537-540
[4]   Direct writing of conductive silver micropatterns on flexible polyimide film by laser-induced pyrolysis of silver nanoparticle-dispersed film [J].
Aminuzzaman, Mohammod ;
Watanabe, Akira ;
Miyashita, Tokuji .
JOURNAL OF NANOPARTICLE RESEARCH, 2010, 12 (03) :931-938
[5]   Femtosecond laser ablation of indium tin-oxide narrow grooves for thin film solar cells [J].
Bian, Qiumei ;
Yu, Xiaoming ;
Zhao, Baozhen ;
Chang, Zenghu ;
Lei, Shuting .
OPTICS AND LASER TECHNOLOGY, 2013, 45 :395-401
[6]   Effects of ITO Pattern on the Electrical and Optical Characteristics of LEDs [J].
Cao, Bin ;
Zhou, Shengjun ;
Liu, Sheng .
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2013, 2 (01) :R24-R28
[7]   Fabrication of Highly Transparent and Conductive Indium-Tin Oxide Thin Films with a High Figure of Merit via Solution Processing [J].
Chen, Zhangxian ;
Li, Wanchao ;
Li, Ran ;
Zhang, Yunfeng ;
Xu, Guoqin ;
Cheng, Hansong .
LANGMUIR, 2013, 29 (45) :13836-13842
[8]   Indium tin oxide films made from nanoparticles:: models for the optical and electrical properties [J].
Ederth, J ;
Heszler, P ;
Hultåker, A ;
Niklasson, GA ;
Granqvist, CG .
THIN SOLID FILMS, 2003, 445 (02) :199-206
[9]   Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium oxide particles [J].
Ederth, J ;
Hultåker, A ;
Heszler, P ;
Niklasson, GA ;
Granqvist, CG ;
van Doorn, A ;
van Haag, C ;
Jongerius, MJ ;
Burgard, D .
SMART MATERIALS & STRUCTURES, 2002, 11 (05) :675-678
[10]   Wet chemical deposition of ATO and ITO coatings using crystalline nanoparticles redispersable in solutions [J].
Goebbert, C ;
Nonninger, R ;
Aegerter, MA ;
Schmidt, H .
THIN SOLID FILMS, 1999, 351 (1-2) :79-84