High-frequency V-doped ZnO/SiC surface acoustic wave devices with enhanced electromechanical coupling coefficient

被引：26

作者：

Fu, Sulei ^{[1
]}

Wang, Weibiao ^{[2
]}

Li, Qi ^{[1
]}

Lu, Zengtian ^{[2
]}

Chen, Zhenglin ^{[3
]}

Luo, Jingting ^{[4
]}

Shen, Junyao ^{[1
]}

Wang, Rui ^{[1
]}

Song, Cheng ^{[1
]}

Zeng, Fei ^{[1
]}

Pan, Feng ^{[1
]}

机构：

[1] Tsinghua Univ, Sch Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China

[2] SHOULDER Elect Ltd, Wuxi 214124, Jiangsu, Peoples R China

[3] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China

[4] Shenzhen Univ, Shenzhen Key Lab Sensor Technol, Coll Phys & Energy, Shenzhen 518060, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2019年 / 114卷 / 11期

关键词：

MGXZN1-XO FILMS; QUALITY FACTOR; THIN-FILMS; RESONATORS; SAPPHIRE; MODE; ZINC; MG;

D O I：

10.1063/1.5086445

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The rapid development of large-volume and high-speed mobile communication systems has increased the demand for high-frequency and wide-band surface acoustic wave (SAW) devices. In this work, ZnO films and V-doped ZnO (V:ZnO) films with (0002) orientation were grown on SiC substrates using a magnetron sputtering method. High-frequency SAW resonators with the resonant frequency ranging from 4 GHz to 6 GHz were fabricated on the above structures. V:ZnO/SiC SAW resonators exhibited a significantly increased electromechanical coupling coefficient (K-2) in the range of 2.80%-5.12%, in a wide normalized thickness range, which is more than a 75% increase compared to that of ZnO-based SAW resonators. Besides, the high quality factor Q ranging from 431 to 593 and an improvement in the figure of merit value were observed for the V:ZnO/SiC SAW resonators operating at 4-6 GHz. Finally, 4.58 GHz SAW filters using V:ZnO films with a larger bandwidth and a lower insertion loss were achieved. This work clearly shows that the ZnO/SiC SAW properties can be improved by V doping, and the V:ZnO/SiC structures have great potential for application in high-frequency and wide-band SAW filters. Published under license by AIP Publishing.

引用

页数：5

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