Threshold voltage shifts in decananometre-gate AlGaN/GaN HEMTs

被引:9
作者
Endoh, A
Yamashita, Y
Hikosaka, K
Matsui, T
Hiyamizu, S
Mimura, T
机构
[1] Fujitsu Labs Ltd, Kanagawa 2430197, Japan
[2] Natl Inst Informat & Commun Technol, Tokyo 1848795, Japan
[3] Osaka Univ, Grad Sch Engn Sci, Osaka 5608531, Japan
关键词
D O I
10.1049/el:20060513
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Decananometre-T-shaped-Ni/Pt/Au-gate AlGaN/GaN HEMTs on sapphire substrates are fabricated and their DC characteristics measured. The negative shifts of threshold voltages occur below 5-6 of channel aspect ratio L-g/d, where L-g is the gate length and d is the AlGaN barrier layer thickness. This is a similar trend as observed in AlGaAs/GaAs HEMTs. The negative threshold voltage shifts are enhanced with increasing d, which results from the increase of the two-dimensional electron gas thickness.
引用
收藏
页码:490 / 492
页数:3
相关论文
共 8 条
[1]   SHORT-CHANNEL EFFECTS IN SUBQUARTER-MICROMETER-GATE HEMTS - SIMULATION AND EXPERIMENT [J].
AWANO, Y ;
KOSUGI, M ;
KOSEMURA, K ;
MIMURA, T ;
ABE, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (10) :2260-2266
[2]   Fabrication of sub-50-nm-gate i-AlGaN/GaN HEMTs on sapphire [J].
Endoh, A ;
Yamashita, Y ;
Ikeda, K ;
Higashiwaki, M ;
Hikosaka, K ;
Matsui, T ;
Hiyamizu, S ;
Mimura, T .
5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07) :2368-2371
[3]   0.05-MU-M-GATE INALAS/INGAAS HIGH-ELECTRON-MOBILITY TRANSISTOR AND REDUCTION OF ITS SHORT-CHANNEL EFFECTS [J].
ENOKI, T ;
TOMIZAWA, M ;
UMEDA, Y ;
ISHII, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (1B) :798-803
[4]   Transient electron transport in wurtzite GaN, InN, and AlN [J].
Foutz, BE ;
O'Leary, SK ;
Shur, MS ;
Eastman, LF .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (11) :7727-7734
[5]   Improvement of DC and RF characteristics of AlGaN/GaN high electron mobility transistors by thermally annealed Ni/Pt/Au Schottky gate [J].
Nanjo, T ;
Miura, N ;
Oishi, T ;
Suita, M ;
Abe, Y ;
Ozeki, T ;
Nakatsuka, S ;
Inoue, A ;
Ishikawa, T ;
Matsuda, Y ;
Ishikawa, H ;
Egawa, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (4B) :1925-1929
[6]   Improved power performance for a recessed-gate AlGaN-GaN heterojunction FET with a field-modulating plate [J].
Okamoto, Y ;
Ando, Y ;
Hataya, K ;
Nakayama, T ;
Miyamoto, H ;
Inoue, T ;
Senda, M ;
Hirata, K ;
Kosaki, M ;
Shibata, N ;
Kuzuhara, M .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2004, 52 (11) :2536-2540
[7]   Novel high-yield trilayer resist process for 0.1 mu m T-gate fabrication [J].
Wakita, AS ;
Su, CY ;
Rohdin, H ;
Liu, HY ;
Lee, A ;
Seeger, J ;
Robbins, VM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2725-2728
[8]   30-W/mm GaNHEMTs by field plate optimization [J].
Wu, YF ;
Saxler, A ;
Moore, M ;
Smith, RP ;
Sheppard, S ;
Chavarkar, PM ;
Wisleder, T ;
Mishra, UK ;
Parikh, P .
IEEE ELECTRON DEVICE LETTERS, 2004, 25 (03) :117-119