Mechanism of the effects of low temperature Al2O3 passivation on graphene field effect transistors

被引:52
作者
Kang, Chang Goo [1 ]
Lee, Young Gon [1 ]
Lee, Sang Kyung [1 ]
Park, Eunji [2 ]
Cho, Chunhum [2 ]
Lim, Sung Kwan [2 ]
Hwang, Hyeon Jun [1 ]
Lee, Byoung Hun [1 ,2 ]
机构
[1] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, Kwangju 500712, South Korea
[2] Gwangju Inst Sci & Technol, Dept Nanobio Mat & Elect, Kwangju 500712, South Korea
关键词
HIGH-QUALITY; LARGE-AREA; SUPPRESSION; HYSTERESIS; CONDUCTION; DIAMOND; FILMS;
D O I
10.1016/j.carbon.2012.10.046
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The origin of the device instability of chemical vapor deposited graphene metal oxide semiconductor field effect transistor has been investigated while varying the characterization time scale from milliseconds to a few tens of seconds. When oxygen diffusion to the graphene interface was suppressed with Al2O3 passivation layer, the hysteresis activated with a, time scale over a few tens of seconds was reduced significantly at both electron and hole branches of current-voltage curves. However, a fast charge trapping process occurring within a few milliseconds was not affected by the passivation and became a dominant mechanism of hysteresis. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码:182 / 187
页数:6
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