Improving the Morphological and Optical Properties of Sputtered Indium Tin Oxide Thin Films by Adopting Ultralow-Pressure Sputtering

被引：27

作者：

Huh, Myung Soo ^{[1
,2
,3
]}

Yang, Bong Seop ^{[1
,2
]}

Song, Jaewon ^{[1
,2
]}

Heo, Jaeyeong ^{[1
,2
]}

Won, Seok-Jun ^{[1
,2
]}

Jeong, Jae Kyeong ^{[4
]}

Hwang, Cheol Seong ^{[1
,2
]}

Kim, Hyeong Joon ^{[1
,2
]}

机构：

[1] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151744, South Korea

[2] Seoul Natl Univ, Interuniv Semicond Res Ctr, Seoul 151744, South Korea

[3] Samsung SDI Co Ltd, Core Technol Lab, Gyeonggi Do 442391, South Korea

[4] Samsung SDI Co Ltd, Corp Res & Dev Ctr, Gyeonggi Do 442391, South Korea

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2009年 / 156卷 / 01期

关键词：

absorption coefficients; annealing; atomic force microscopy; display devices; electrical resistivity; Hall mobility; indium compounds; semiconductor thin films; sputter deposition; surface morphology; surface roughness; wide band gap semiconductors; ELECTRICAL-PROPERTIES; STRUCTURAL-PROPERTIES; HEAT-TREATMENT; ITO FILMS; GAS; CRYSTALLIZATION; MICROSTRUCTURE; RESISTIVITY; STRESS;

D O I：

10.1149/1.3005562

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The morphological and optical properties of indium tin oxide (ITO) thin films deposited by an ultralow-pressure dc magnetron sputtering (ULPS) method followed by postannealing treatment at 250 degrees C are reported. The surface roughness of the film (R-rms: 0.5 nm) deposited using ULPS was about 5 times lower than that of the film (R-rms: 2.7 nm) sputtered using a pressure of 6.7x10(-1) Pa. ITO thin films with a low resistivity of 3.7x10(-4) Omega cm were also achieved using a continuous two-step deposition process, in which the initial layer was deposited using ULPS and then the final layer was deposited with a SP of 6.7x10(-1) Pa, without the use of any other additional steps. Both the ULPS and continuous two-step deposition methods were found to be effective for producing ITO thin films with enhanced morphologies that make them suitable for use in display devices.

引用

页码：J6 / J11

页数：6

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