Millimeter Wave Radar-based Plasma Measurements

被引：0

作者：

Schulz, Christian ^{[1
]}

Baer, Christoph ^{[2
]}

Fiebrandt, Marcel ^{[3
]}

机构：

[1] Ruhr Univ Bochum, Inst Microwave Syst, Univ Str 150, D-44801 Bochum, Germany

[2] Ruhr Univ Bochum, Inst Elect Circuits, Univ Str 150, D-44801 Bochum, Germany

[3] Ruhr Univ Bochum, Inst Elect Engn & Plasma Technol, Univ Str 150, D-44801 Bochum, Germany

来源：

PROCEEDINGS OF THE 2019 IEEE ASIA-PACIFIC MICROWAVE CONFERENCE (APMC) | 2019年

关键词：

millimeter wave; radar; plasma diagnostics; phase measurements;

D O I：

10.1109/apmc46564.2019.9038885

中图分类号：

TN [电子技术、通信技术];

学科分类号：

0809 ;

摘要：

A new approach for contactless in-situ plasma measurements, based on phase evaluation of a high precise FMCW radar is presented in this paper. Assuming the plasma to act like a frequency dependent dielectric material, its dependency on the time-of-Flight and therefore, the phase is analyzed. 3D electromagnetic field simulations are applied for the investigation of the measurement effect, using the Drude model to describe the dielectric properties of the plasma. It can be shown, the longer the propagation length the stronger the change in phase, which is also directly affected by the plasma electron frequency. Final measurements with an 80 GHz FMCW radar in an excited argon plasma prove the applicability of this new approach with a maximum phase difference of 54 degrees.

引用

页码：756 / 758

页数：3

共 7 条

[1]

Baer C, 2011, ASIA PACIF MICROWAVE, P1814

[2] Contactless Detection of State Parameter Fluctuations of Gaseous Media Based on an mm-Wave FMCW Radar [J].

Baer, Christoph ;

Jaeschke, Timo ;

Pohl, Nils ;

Musch, Thomas .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2015, 64 (04) :865-872

[3] Inactivation of B. subtilis spores by low pressure plasma-influence of optical filters and photon/particle fluxes on the inactivation efficiency [J].

Fiebrandt, Marcel ;

Hillebrand, Bastian ;

Lackmann, Jan-Wilm ;

Raguse, Marina ;

Moeller, Ralf ;

Awakowicz, Peter ;

Stapelmann, Katharina .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2018, 51 (04)

[4]

Hattenhorst B, 2016, GER MICROW CONF, P301, DOI 10.1109/GEMIC.2016.7461616

[5] An Ultra-Wideband 80 GHz FMCW Radar System Using a SiGe Bipolar Transceiver Chip Stabilized by a Fractional-N PLL Synthesizer [J].

Pohl, Nils ;

Jaeschke, Timo ;

Aufinger, Klaus .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2012, 60 (03) :757-765

[6] The Multipole Resonance Probe: Progression and Evaluation of a Process Compatible Plasma Sensor [J].

Schulz, Christian ;

Styrnoll, Tim ;

Storch, Robert ;

Awakowicz, Peter ;

Musch, Thomas ;

Rolfes, Ilona .

IEEE SENSORS JOURNAL, 2014, 14 (10) :3408-3417

[7]

Seshadri S.R., 1973, Fundamentals of Plasma Physics

← 1 →