Negative resistance, capacitance in Mn/SiO2/p-Si MOS structure

被引:27
|
作者
Ashery, A. [1 ]
Elnasharty, Mohamed M. M. [2 ]
Khalil, Ahmed Asaad, I [3 ]
Azab, A. A. [1 ]
机构
[1] Natl Res Ctr, Solid State Elect Lab, Solid State Phys Dept, Phys Res Div, 33 El Bohouth St, Giza 12622, Egypt
[2] Natl Res Ctr, Microwave Phys & Dielect Dept, Phys Div, Giza 12622, Egypt
[3] Cairo Univ, Natl Inst Laser Enhanced Sci NILES, Laser Sci & Interact Dept, Giza 12613, Egypt
关键词
Mn; SiO2; p-Si; negative capacitance; dielectric properties; MOS; DEPENDENT SERIES RESISTANCE; DIELECTRIC-PROPERTIES; SCHOTTKY DIODES; ELECTRICAL-PROPERTIES; IN/GA INTERDIFFUSION; INTERFACE STATES; TUNNEL-DIODES; TEMPERATURE; FREQUENCY; VOLTAGE;
D O I
10.1088/2053-1591/aba818
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work is that we have manufactured a new structure that had not been studied by researchers before. This structure is Mn/SiO2/Si was synthesised by liquid phase epitaxy (LPE) as a metal-oxide- semiconductor (MOS) and can be used as a tunneling diode; demonstrated from I-V measurement and negative resistance. The structure and its characterization were examined by scanning electron microscope, XRD diffraction, C-V and I-V measurements. We studied the temperature, voltage dependence of dielectric and electrical parameters of the fabricated Mn/SiO2/P-Si MOS device. I-V measurements for this structure display diode tunnel behavior with negative resistance. Parameters such as series resistance (Rs), permittivity (e '), dielectric loss (e ''), a tangent of the dielectric loss factor (tan delta), real and imaginary parts of electrical modulus (M ' and M '') and ac conductivity were examined in a temperature range of 303-393 K and frequency range (10 Hz-20 MHz) under 1 Vrms applied voltage along with dc bias range of (-2.0-2.0 V). We found that thermal reordering of the interface is a reason for a continuous density distribution of interface states with homogenous relaxation time, which in turn induced a higher sensitivity to both C and G/w response with electric field frequency. The device showed negative values for capacitance (C), dielectric loss (e ''), and dielectric loss tangent (tan delta) at all temperatures.
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页数:12
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