Design and Electro-Thermal Analysis of a Platinum Micro Heater for Gas Sensors

被引：0

作者：

Bedoui, Souhir ^{[1
]}

Gomri, Sami ^{[2
]}

Samet, Hekmet ^{[1
]}

Kachouri, Abdennaceur ^{[1
]}

机构：

[1] Univ Sfax, Natl Sch Engineer Sfax, Dept Elect Engn, Res Lab Elect & Informat Technol LETI, Sfax, Tunisia

[2] Univ Sfax, Natl Sch Engineer Sfax, Dept Elect Engn, Micro Elect Thermal Syst METS Lab, Sfax, Tunisia

来源：

2016 13TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS & DEVICES (SSD) | 2016年

关键词：

gas sensors; heater; platinum; electro-thermal analysis;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

Micro Hotplate (MHP) is the key component in micro-sensors particularly gas sensors. In this paper, we have presented the design and simulation results of a meander micro heater based on platinum material. A comparative study by simulating two different heater thicknesses has also been presented in this paper. The membrane size is 1.4mm x 1.6mm and a thickness of 1.4 mu m. Above the membrane, a platinum film was deposed with a size of 1.1 x 1.1 mm and a various thickness of 0.1 mu m and 0.15 mu m. Power consumption and temperature distribution were determined in the Platinum micro heater's structure over a supply voltage of 5, 6 and 7 V.

引用

页码：558 / 561

页数：4

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