Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application

被引：20

作者：

Abdul, B. ^{[1
,2
]}

Mastronardi, V. M. ^{[1
]}

Qualtieri, A. ^{[1
]}

Guido, F. ^{[1
]}

Algieri, L. ^{[1
]}

Rizzi, F. ^{[1
]}

De Vittorio, M. ^{[1
,2
]}

机构：

[1] Ist Italiano Tecnol, Ctr Biomol Nanotechnol, Via Barsanti 14, I-73010 Arnesano, LE, Italy

[2] Univ Salento, Dept Innovat Engn, Via Monteroni, I-73100 Lecce, Italy

来源：

MICRO AND NANO ENGINEERING | 2020年 / 7卷

关键词：

MEMS; Cantilevers; AlN; Piezoelectricity; Laser; Doppler Vibrometer; Hydrophone;

D O I：

10.1016/j.mne.2020.100050

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work shows a preliminary microfabrication route for a novel directional hydrophone based on a cross-shaped design of piezoelectric cantilevers. A thin layer of aluminum nitride (AlN) using Molybdenum (Mo) thin film as electrodes will be exploited as piezoelectric functional layer for the microfabrication of a cantilever-based ultrasonic micro electro mechanical system (MEMS) hydrophone. A parameterized simulation based on length of these cantilevers between 100 and 1000 mu m allowed to set the first resonant mode between 20 kHz and 200 kHz, the desired underwater ultrasonic acoustic range. The microsystem was designed with cantilevers facing each other in a cross configuration in order to have novel MEMS hydrophone with an omnidirectional response. In order to investigate the first resonance frequency mode and displacement measurements, a Laser Doppler Vibrometer was used and good agreement between simulations and experimental results was achieved. Responsivity and directionality measurements of the piezoelectric MEMS cantilevers were performed in water. Maximum sensitivity up to -153 dB with omnidirectional directivity pattern was achieved by fabricated MEMS sensor.

引用

页数：7

共 19 条

[1] Flexible and Surface-Mountable Piezoelectric Sensor Arrays for Underwater Sensing in Marine Vehicles [J].