Application of modified molecular gas lubrication equation to the analysis of micromotor bushings

被引:17
作者
Chen, MD
Lin, JW
Lee, SC
Chang, KM
Li, WL [1 ]
机构
[1] Tung Fang Inst Technol, Dept Chem Engn, Kaohsiung 829, Taiwan
[2] Natl Kaohsiung Univ Appl Sci, Dept Mech Engn, Kaohsiung 80782, Taiwan
关键词
micromotor; roughness; gas rarefaction;
D O I
10.1016/j.triboint.2004.01.006
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
The microtribological phenomena have important effects on microelectro-mechanical systems (MEMS), especially when relative motion is required (e.g. microactuators). From the design concept of self-acting bearings (e.g. the flying head in a magnetic recording system), some step-shaped bushings beneath the rotor of a micromotor are considered and analyzed quantitatively. The modified molecular gas lubrication equation (MMGL) is utilized to analyze the step-shaped bushings. The results show that the coupling effects of roughness and gas rarefaction are significant and important in the design of bushings. (C) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码:507 / 513
页数:7
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