Conception and design of a thermal valvless micropump

被引:1
作者
Manzoni, G [1 ]
Heisig, S
Takano, T
Kocer, C
Goto, H
Mihara, T
Maeda, R
机构
[1] AIST, MEMS Grp, Namiki 1-2-1, Tsukuba, Ibaraki 3058564, Japan
[2] Microspace, I-34100 Trieste, Italy
[3] Natl Inst Mat Sci, Adv Mat Lab, Tsukuba, Ibaraki 3050044, Japan
[4] Univ Sydney, Sch Phys, Sydney, NSW, Australia
[5] Olympus Corp, Future Creat Lab, Tokyo, Japan
来源
BIOMEMS AND NANOTECHNOLOGY II | 2006年 / 6036卷
关键词
micropump; microcompressor; valveless; fluidic microdiodes; microfluidics; microheater;
D O I
10.1117/12.638467
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
This paper describes the conception and design of a micropump for gas, with no moving or deformable parts, for use on the future sensor network system, which includes environment monitoring. This design is original because of the complete absence of moving parts for the pumping of gas. In fact, fluid movement was obtained by means of repetitive heating and cooling cycles of the gas, in the pump chamber. The prototyping work is on going and the first results are presented with particular emphasis on thermal characterization.
引用
收藏
页数:9
相关论文
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