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Characterization of defect levels in undoped n-BaSi2 epitaxial films on Si(111) by deep-level transient spectroscopy
被引:14
作者:
Takeuchi, Hiroki
[1
]
Du, Weijie
[1
]
Baba, Masakazu
[1
]
Takabe, Ryota
[1
]
Toko, Kaoru
[1
]
Suemasu, Takashi
[1
,2
]
机构:
[1] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
[2] CREST, Japan Sci & Technol Agcy, Chiyoda Ku, Tokyo 1020075, Japan
基金:
日本科学技术振兴机构;
关键词:
MOLECULAR-BEAM EPITAXY;
SOLAR-CELLS;
BASI2;
EFFICIENCY;
BETA-FESI2;
SI;
D O I:
10.7567/JJAP.54.07JE01
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
Electrically active defect levels in 650-nm-thick undoped n-BaSi2 epitaxial layers grown by molecular beam epitaxy were investigated by deep-level transient spectroscopy (DLTS) using undoped n-BaSi2/p-Si heterojunction diodes. The layer structure was designed so that the depletion region extended toward the n-BaSi2 layers under reverse bias conditions. DLTS revealed the presence of majority-carrier (electron) traps located at approximately 0.1 and 0.2 eV below the bottom of the conduction band. The densities of these trap levels were approximately 1 x 10(15) cm(-3). Photoresponse spectra are also discussed in relation to these trap levels. Minority-carrier traps were not detected in this work. (C) 2015 The Japan Society of Applied Physics
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