Characterization of defect levels in undoped n-BaSi2 epitaxial films on Si(111) by deep-level transient spectroscopy

被引:14
|
作者
Takeuchi, Hiroki [1 ]
Du, Weijie [1 ]
Baba, Masakazu [1 ]
Takabe, Ryota [1 ]
Toko, Kaoru [1 ]
Suemasu, Takashi [1 ,2 ]
机构
[1] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
[2] CREST, Japan Sci & Technol Agcy, Chiyoda Ku, Tokyo 1020075, Japan
基金
日本科学技术振兴机构;
关键词
MOLECULAR-BEAM EPITAXY; SOLAR-CELLS; BASI2; EFFICIENCY; BETA-FESI2; SI;
D O I
10.7567/JJAP.54.07JE01
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electrically active defect levels in 650-nm-thick undoped n-BaSi2 epitaxial layers grown by molecular beam epitaxy were investigated by deep-level transient spectroscopy (DLTS) using undoped n-BaSi2/p-Si heterojunction diodes. The layer structure was designed so that the depletion region extended toward the n-BaSi2 layers under reverse bias conditions. DLTS revealed the presence of majority-carrier (electron) traps located at approximately 0.1 and 0.2 eV below the bottom of the conduction band. The densities of these trap levels were approximately 1 x 10(15) cm(-3). Photoresponse spectra are also discussed in relation to these trap levels. Minority-carrier traps were not detected in this work. (C) 2015 The Japan Society of Applied Physics
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页数:5
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