Design and Simulation of a Micromachined Membrane Flow-Meter

In this paper a new piezoresistive flow -meter has been proposed. For enhancement of sensitivity, a large membrane is placed vertically against the flow direction to maximize the air drag force. In the new proposed structure supporting beams do not scale up the total die -size, and due to large torsion spring constant, considerable incensement in mechanical stability is achieved. The range of measureable flow is 0-6m/s, and maximum variation of piezoresistors is 3.6 percent. Bulk micromachining technology is proposed for fabrication process and total die -size of flowmeter is 1.5x1.5 mm(2).