Optical nanocavity enabling hyper resolution in 2D and 3D two photon direct writing lithography towards flat metalens

被引:0
作者
Lio, Giseppe Emanuele [1 ,2 ,3 ,4 ,5 ]
Ferraro, Antonio [1 ,2 ]
Ritacco, Tiziana [1 ,2 ]
Aceti, Dante Maria [1 ,2 ]
De Luca, Antonio [1 ,2 ]
Giocondo, Michele [1 ,2 ]
Caputo, Roberto [1 ,2 ,5 ]
机构
[1] Univ Calabria, CNR Nanotec, Arcavacata Di Rende, CS, Italy
[2] Univ Calabria, Dept Phys, Arcavacata Di Rende, CS, Italy
[3] CNR, Natl Inst Opt, CNR INO, LENS,European Lab Non Linear Spect, Sesto Fiorentino, FI, Italy
[4] Univ Firenze, Dept Phys, Sesto Fiorentino, FI, Italy
[5] Univ Elect Sci & Technol China, Inst Fundamental & Frontier Sci, Chengdu 610054, Peoples R China
来源
2022 ITALIAN CONFERENCE ON OPTICS AND PHOTONICS (ICOP) | 2022年
关键词
Two Photon Lithography; Metamaterials; Metalens; Hyper Resolution; ACHROMATIC METALENS;
D O I
10.1109/ICOP56156.2022.9911744
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An increasing amount of research is being devoted to improve the spatial resolution in direct laser writing (DLW) technique allowing the fabrication of complex 2D and 3D nanoscale devices. Among the various possibilities, we exploited uncommon features as extraordinary transmittance, zero re ectance, giant dephasing and epsilon-near-zero relative permittivity of a metal/insulator/metal/insulator (MIMI) planar multilayer to upgrade a standard two-photon DLWprocess to hyper resolution. The improved resolution opens new opportunities in the fabrication of next-generation nanoscale devices such as metalenses, photonic circuits to name a few and in thermoplamonics. A high writing resolution is crucial for industrial applications in fields like anti-counterfeiting and at optics. Having reduced the voxel size by 89% in height and 50% in width, we fabricated full-dielectric broadband metalenses and in order to demonstrate the full capability of the achieved hyper resoution flat detailed bas-relief of Da Vinci's "Lady with an Ermine" has been realized.
引用
收藏
页数:4
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