Effect of Sputtering Gas on Structural and Optical Properties of Sputtered SiC Thin Films

被引：1
|
作者：
Kumar, Mukesh [1 ]
Chandra, Ramesh [1 ]
Mishra, Raghwesh [2 ]
Tiwari, Rajesh K. [2 ]
Saxena, A. K. [2 ]
机构：
[1] Indian Inst Technol, Inst Instrumentat Ctr, Nanosci Lab, Roorkee 247667, UK, India
[2] Div Appl Chem, Def Mat Stores Res, Dev Estab DMSRDE, Kanpur 208013, Uttar Pradesh, India
来源：
INDIAN VACUUM SOCIETY SYMPOSIUM ON THIN FILMS: SCIENCE & TECHNOLOGY | 2012年 / 1451卷
关键词：
SiC thin films; Magnetron sputtering; Raman spectroscopy; PL spectroscopy; GROWTH; DEPOSITION;
D O I：
10.1063/1.4732434
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We report the structural and optical properties of nanostructured SiC thin films deposited on Si (100) and glass substrates by RF-magnetron sputtering. The effect of sputtering pressure on these properties has been studied systematically. The formations of SiC as well as carbon clusters were found in the measured Raman spectra. The average roughness of the SiC films increases with increase in the sputtering pressure. The optical band gap of the SiC films measured by UV-Visible spectrophotometer was found to decrease from 2.43 to 2.02 eV with increase in sputtering pressure from 10 to 20 mTorr. The UV-Visible spectroscopy results were in agreement with the data observed by Photoluminescence (PL) spectroscopy.
引用
收藏
页码：260 / 262
页数：3
相关论文
共 50 条
  • [21] Effect of substrate position on Structural, Morphological, and Optical properties of reactively sputtered ZnO thin films
    Kumar, J. Vinoth
    Matsumoto, Y.
    Maldonado, A.
    Olvera, M. de la L.
    2016 13TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING, COMPUTING SCIENCE AND AUTOMATIC CONTROL (CCE), 2016,
  • [22] Effect of chemical sputtering on the growth and structural evolution of magnetron sputtered CNx thin films
    Hellgren, N
    Johansson, MP
    Broitman, E
    Sandström, P
    Hultman, L
    Sundgren, JE
    THIN SOLID FILMS, 2001, 382 (1-2) : 146 - 152
  • [23] Effect of reactive gas flow on structural and optical properties of sputtered silver oxide thin films; Kramers-Kronig method
    Asgary, Somayeh
    Esmaili, Parisa
    OPTICAL AND QUANTUM ELECTRONICS, 2023, 55 (02)
  • [24] Effect of oxygen partial pressure on the structural and optical properties of dc sputtered ITO thin films
    Kerkache, L.
    Layadi, A.
    Mosser, A.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 485 (1-2) : 46 - 50
  • [25] Effect of thermal annealing on the structural, optical and microstructural properties of a-SiC thin films
    Baskar, Sam
    Azam, Abu Bakr
    Akshay, S.
    Thomas, Nikhil S.
    Devesh, M.
    Hariprasath, B.
    Nalini, R. Pratibha
    ADVANCES IN MATERIALS AND PROCESSING TECHNOLOGIES, 2019, 5 (03) : 438 - 444
  • [26] The Effect of Sputtering RF Power on Structural, Optical and Electrical Properties of CuO and CuO2 Thin Films
    Razeghizadeh, Alireza
    Ghalvandi, Maryam Mahmoudi
    Sohilian, Farhang
    Rafee, Vandat
    JOURNAL OF NANOSTRUCTURES, 2019, 9 (02) : 230 - 237
  • [27] Structural, Optical and Electrical Properties of Polycrystalline CuO Thin Films Prepared by Magnetron Sputtering
    Li, Jingjie
    Li, Xinzhong
    Wang, Hui
    Zhao, Yang
    Sun, Yanyan
    Sun, Xiaojun
    Zhen, Zhiqiang
    Li, Qiuze
    Yang, Fan
    JOURNAL OF ELECTRONIC MATERIALS, 2018, 47 (10) : 5788 - 5792
  • [28] Structural and optical properties of CdTe thin films deposited using RF magnetron sputtering
    Kulkarni, Rupali
    Rondiya, Sachin
    Pawbake, Amit
    Waykar, Ravindra
    Jadhavar, Ashok
    Jadkar, Vijaya
    Bhorde, Ajinkya
    Date, Abhijit
    Pathan, Habib
    Jadkar, Sandesh
    1ST INTERNATIONAL CONFERENCE ON ENERGY AND POWER, ICEP2016, 2017, 110 : 188 - 195
  • [29] Effect of sputtering time and calcination temperature duration on the structural, optical, and magnetic properties of DC sputtered SrM films
    Gor, Abhishek A.
    Singh, Ankita
    Devashrayee, Niranjan M.
    Jotania, Rajshree B.
    Chauhan, Chetna C.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2024, 35 (08)
  • [30] Structural and optical properties of CdS thin films prepared by RF sputtering
    Zhu Yan-Yan
    Xu Run
    Fanf Ze-Bo
    JOURNAL OF INFRARED AND MILLIMETER WAVES, 2014, 33 (01) : 40 - 44
12345