Effect of Sputtering Gas on Structural and Optical Properties of Sputtered SiC Thin Films

被引：1
|
作者：
Kumar, Mukesh [1 ]
Chandra, Ramesh [1 ]
Mishra, Raghwesh [2 ]
Tiwari, Rajesh K. [2 ]
Saxena, A. K. [2 ]
机构：
[1] Indian Inst Technol, Inst Instrumentat Ctr, Nanosci Lab, Roorkee 247667, UK, India
[2] Div Appl Chem, Def Mat Stores Res, Dev Estab DMSRDE, Kanpur 208013, Uttar Pradesh, India
来源：
INDIAN VACUUM SOCIETY SYMPOSIUM ON THIN FILMS: SCIENCE & TECHNOLOGY | 2012年 / 1451卷
关键词：
SiC thin films; Magnetron sputtering; Raman spectroscopy; PL spectroscopy; GROWTH; DEPOSITION;
D O I：
10.1063/1.4732434
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We report the structural and optical properties of nanostructured SiC thin films deposited on Si (100) and glass substrates by RF-magnetron sputtering. The effect of sputtering pressure on these properties has been studied systematically. The formations of SiC as well as carbon clusters were found in the measured Raman spectra. The average roughness of the SiC films increases with increase in the sputtering pressure. The optical band gap of the SiC films measured by UV-Visible spectrophotometer was found to decrease from 2.43 to 2.02 eV with increase in sputtering pressure from 10 to 20 mTorr. The UV-Visible spectroscopy results were in agreement with the data observed by Photoluminescence (PL) spectroscopy.
引用
收藏
页码：260 / 262
页数：3
相关论文
共 50 条
  • [1] Effect of sputtering gas on structural, optical and hydrophobic properties of DC-sputtered hafnium oxide thin films
    Dave, V.
    Dubey, P.
    Gupta, H. O.
    Chandra, R.
    SURFACE & COATINGS TECHNOLOGY, 2013, 232 : 425 - 431
  • [2] Effect of sputtering power on the structure and optical band gap of SiC thin films
    Cheng, Yong
    Huang, Xiaozhong
    Du, Zuojuan
    Xiao, Jianrong
    OPTICAL MATERIALS, 2017, 73 : 723 - 728
  • [3] Effect of sputtering process parameters on structural and optical properties of CdS thin films
    Kumar, Ashwani
    Kumar, Vipin
    Chandra, Ramesh
    Gautam, Yogendra K.
    MATERIALS RESEARCH EXPRESS, 2019, 6 (10):
  • [4] Structural, optical and electrical properties of sputtered NiO thin films for gas detection
    Predanocy, M.
    Hotovy, I.
    Caplovicova, M.
    APPLIED SURFACE SCIENCE, 2017, 395 : 208 - 213
  • [5] Structural and Morphological Properties of Sputtered NiO Thin Films at Various Sputtering Pressures
    Reddy, A. Mallikarjuna
    Reddy, Y. Ashok Kumar
    Reddy, A. Sivasankar
    Reddy, P. Sreedhara
    SOLID STATE PHYSICS, PTS 1 AND 2, 2012, 1447 : 619 - +
  • [6] Influence of SiC thin films thickness on the electrical properties of Pd/SiC thin films for hydrogen gas sensor
    Kumar, Mukesh
    Kumar, Ashwani
    Gautam, Yogendra K.
    Chandra, Ramesh
    Goyat, Manjeet S.
    Tewari, B. S.
    Tewari, Rajesh K.
    VACUUM, 2020, 182
  • [7] Structural, morphological, electrical and optical properties of PbSe thin films sputtered at various pressures
    Feng, Wenran
    Song, Jiali
    Ren, Yashuang
    Yi, Liya
    Hu, Jifei
    Zhu, Ran
    Dong, Haitao
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2018, 102 : 153 - 159
  • [8] Structural and optical properties of RF sputtered ZnO thin films: Annealing effect
    Sener, Emre
    Bayram, Ozkan
    Hasar, Ugur Cem
    Simsek, Onder
    PHYSICA B-CONDENSED MATTER, 2021, 605
  • [9] Structural, Morphological and Optical properties of Sputtered Nickel oxide Thin Films
    Reddy, A. Mallikarjuna
    Reddy, A. Sivasankar
    Reddy, P. Sreedhara
    OPTICS: PHENOMENA, MATERIALS, DEVICES, AND CHARACTERIZATION: OPTICS 2011: INTERNATIONAL CONFERENCE ON LIGHT, 2011, 1391
  • [10] Effect of RF power on the structural and optical properties of RF-sputtered ZnO thin films
    Nkhaili, Lahcen
    El Kissani, Abdelkader
    Ali, Mustapha Ait
    Ijdiyaou, Youssef
    Elmansouri, Abdelmajid
    Elkhalfi, Abdel-Ilah
    Outzourhit, Abdelkader
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2014, 66 (03)
12345