Self-assembled inorganic micro-display on plastic

被引:0
作者
Saeedi, Ehsan [1 ]
Kim, Samuel S. [1 ]
Parviz, Babak A. [1 ]
机构
[1] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA
来源
PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2 | 2007年
关键词
flexible display; self-assembly; process integration;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present the design and a method of construction for micro-displays via integrating free-standing micro light emitting diodes (LED) onto unconventional substrates using fluidic self-assembly. The micro LEDs are fabricated on AlGaAs substrates and released into a powder-like collection of microcomponents. The display substrate is a plastic template patterned with metal interconnects and a photopatternable polymer (SU8) to have a 4x4 array of binding sites each containing areas covered by a low melting point alloy. To assemble the display, the plastic substrate is inserted in a heated acidic ethylene glycol solution and the micro LEDs are released on the surface. Self-assembly of LEDs onto the binding sites aided by shape recognition, capillary forces resultant from the molten alloy, gravity, and fluidic forces completes the display. The self-assembly method allows for integration of crystalline semiconductor devices on plastics and other substrates that are incompatible with conventional microfabrication processes.
引用
收藏
页码:850 / 853
页数:4
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