共 26 条
Flexible pentacene ion sensitive field effect transistor with a hydrogenated silicon nitride surface treated Parylene top gate insulator
被引:22
作者:

Diallo, K.
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机构:
Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France

Lemiti, M.
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机构:
Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France

Tardy, J.
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h-index: 0
机构:
Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France

Bessueille, F.
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机构:
Univ Lyon 1, Sci Analyt Lab, CNRS, UMR 5180, F-69621 Villeurbanne, France Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France

Jaffrezic-Renault, N.
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机构:
Univ Lyon 1, Sci Analyt Lab, CNRS, UMR 5180, F-69621 Villeurbanne, France Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France
机构:
[1] Ecole Cent Lyon, Lyon Inst Nanotechnol, CNRS, UMR 5270, F-69134 Ecully, France
[2] Univ Lyon 1, Sci Analyt Lab, CNRS, UMR 5180, F-69621 Villeurbanne, France
关键词:
chemical vapour deposition;
dielectric materials;
electrolytes;
hydrogen;
ion sensitive field effect transistors;
organic semiconductors;
silicon compounds;
thin films;
D O I:
10.1063/1.3013578
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
We report on the realization of flexible ion sensitive organic field effect transistors based on pentacene on which Parylene-C was deposited as top gate dielectric. In order to create proton sensitive sites at the insulator/electrolyte interface, Parylene-C surface has been covered with a thin layer of hydrogenated silicon nitride (SiN:H) deposited by photochemical vapor deposition at moderate temperature. The combination of Parylene and SiN:H enables the realization of highly reproducible and good performance transistors as well as ion sensitive sensors with an excellent pH response both in the acidic and alkaline pH range in a nearly all plastic technology.
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