Phase-Sensitive Detection for Optical Sensing With Porous Silicon

被引:9
作者
Alvarez, J. [1 ]
Kumar, N. [2 ]
Bettotti, P. [2 ]
Hill, D. [1 ]
Martinez-Pastor, J. [1 ]
机构
[1] Univ Valencia, UMDO, Inst Mat Sci, Valencia 46071, Spain
[2] Univ Trento, Nanosci Lab, Dept Phys, I-38050 Povo, Italy
来源
IEEE PHOTONICS JOURNAL | 2012年 / 4卷 / 03期
关键词
Sensors; fabrication and characterization; subwavelength structures; scattering; metrology; BIREFRINGENCE MEASUREMENTS; SENSOR; MICROCAVITIES; DEPENDENCE; BIOSENSORS;
D O I
10.1109/JPHOT.2012.2201461
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6: 25 x 10(-6) RIU, from the thinnest 10-mu m-thick membrane. Finally, the thermooptic coefficient of the 10 mu m membrane was measured in an aqueous environment and shown to be equal to 8 x 10(-4) rad/degrees C.
引用
收藏
页码:986 / 995
页数:10
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