Surface topography and composition of NiPd alloys under oblique and normal gas cluster ion beam irradiation

被引：14

作者：

Ieshkin, A. E. ^{[1
]}

Kireev, D. S. ^{[1
]}

Tatarintsev, A. A. ^{[1
]}

Chernysh, V. S. ^{[1
]}

Senatulin, B. R. ^{[2
]}

Skryleva, E. A. ^{[2
]}

机构：

[1] Lomonosov Moscow State Univ, Phys Fac, Moscow 119991, Russia

[2] Natl Univ Sci & Technol MISIS, Moscow 119049, Russia

来源：

SURFACE SCIENCE | 2020年 / 700卷

关键词：

Gas cluster ions; Sputtering; XPS; Surface topography; Surface composition; Selective sputtering; AR; EVOLUTION; SILICON; DAMAGE;

D O I：

10.1016/j.susc.2020.121637

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Polycrystalline NiPd and Ni5Pd alloys were irradiated with argon gas cluster ion beam and atomic ion beam. In situ XPS measurements showed surface enrichment with Ni. For cluster ions, the degree of the enrichment was significantly higher, and the ion current density influenced on it. Under oblique cluster ion beam, ripples developed on the surface, and the elements of the alloy redistributed along the surface according to the ripple pattern. For normal cluster ion beam direction, sputtering rate was determined by a crystalline orientation, which limited the smoothing effect.

引用

页数：6

共 38 条

[1] Cluster-induced crater formation [J].

Anders, Christian ;

Ziegenhain, Gerolf ;

Zimmermann, Steffen ;

Urbassek, Herbert M. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (18) :3122-3125

[2] Observing the evolution of regular nanostructured indium phosphide after gas cluster ion beam etching [J].

Barlow, Anders J. ;

Sano, Naoko ;

Murdoch, Billy J. ;

Portoles, Jose F. ;

Pigram, Paul J. ;

Cumpson, Peter J. .

APPLIED SURFACE SCIENCE, 2018, 459 :678-685

[3] Observed damage during Argon gas cluster depth profiles of compound semiconductors [J].

Barlow, Anders J. ;

Portoles, Jose F. ;

Cumpson, Peter J. .

JOURNAL OF APPLIED PHYSICS, 2014, 116 (05)

[4]

Behrisch R., 1981, Sputtering by Particle Bombardment, DOI [10.1007/3-540-10521-2, DOI 10.1007/3-540-10521-2]

[5] A model for sputtering from solid surfaces bombarded by energetic clusters [J].

Benguerba, Messaoud .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2018, 420 :27-32

[6] Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering [J].

Chan, Wai Lun ;

Chason, Eric .

JOURNAL OF APPLIED PHYSICS, 2007, 101 (12)

[7] Surface composition of ion bombarded nickel based alloys [J].

Chernysh, V. S. ;

Brongersma, H. H. ;

Bruener, P. ;

Grehl, T. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 460 :180-184

[8] Angular distribution of atoms sputtered from alloys [J].

Chernysh, V. S. ;

Patrakeev, A. S. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 270 :50-54

[9] Evolution of periodical surface nanostructures under off-normal gas cluster ion irradiation [J].

Ieshkin, A. E. ;

Kireev, D. S. ;

Tatarintsev, A. A. ;

Chernysh, V. S. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 460 :165-168

[10] The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions [J].

Ieshkin, A. E. ;

Kireev, D. S. ;

Ermakov, Yu. A. ;

Trifonov, A. S. ;

Presnov, D. E. ;

Garshev, A. V. ;

Anufriev, Yu. V. ;

Prokhorova, I. G. ;

Krupenin, V. A. ;

Chernysh, V. S. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2018, 421 :27-31

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