Anisotropic, Hierarchical Surface Patterns via Surface Wrinkling of Nanopatterned Polymer Films

被引：89

作者：

Lee, Jung-Hyun ^{[1
]}

Ro, Hyun Wook ^{[1
]}

Huang, Rui ^{[2
]}

Lemaillet, Paul ^{[3
,4
]}

Germer, Thomas A. ^{[3
]}

Soles, Christopher L. ^{[1
]}

Stafford, Christopher M. ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Div Polymers, Gaithersburg, MD 20899 USA

[2] Univ Texas Austin, Dept Aerosp Engn & Engn Mech, Austin, TX 78712 USA

[3] Natl Inst Stand & Technol, Sensor Sci Div, Gaithersburg, MD 20899 USA

[4] Univ Maryland, Inst Res Elect & Appl Phys, College Pk, MD 20742 USA

来源：

NANO LETTERS | 2012年 / 12卷 / 11期

基金：

美国国家科学基金会;

关键词：

Polymeric materials; thin films; patterning; nanostructures; hierarchical structures; metrology; SCALE ROUGHNESS;

D O I：

10.1021/nl303512d

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

By combining surface wrinkling and nanopatterned polymer films, we create anisotropic, hierarchical surfaces whose larger length-scale (wrinkling wavelength) depends intimately on the geometry and orientation of the smaller length-scale (nanopattern). We systematically vary the pattern pitch, pattern height, and residual layer thickness to ascertain the dependence of the wrinkling wavelength on the nanopattern geometry. We apply a composite mechanics Model to gain a quantitative understanding of the relationship between. the geometric parameters and the anisotropy in wrinkling wavelength. Additionally, these results shed light on the effect of surface roughness, as represented by the nanopattern, on the metrology of thin films via Surface wrinkling.

引用

页码：5995 / 5999

页数：5

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