Improving the optical and mechanical characteristics of aluminum thin-film filters by adding thin cap layers

被引：10

作者：

Chkhalo, N. I. ^{[1
]}

Kuzin, S. V. ^{[2
]}

Lopatin, A. Ya. ^{[1
]}

Luchin, V. I. ^{[1
]}

Salashchenko, N. N. ^{[1
]}

Zuev, S. Yu. ^{[1
]}

Tsybin, N. N. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Appl Phys, Ulyanov St 46, Nizhnii Novgorod 603950, Russia

[2] Russian Acad Sci, Lebedev Phys Inst, Leninskiy Prospekt 53, Moscow 119991, Russia

来源：

THIN SOLID FILMS | 2018年 / 653卷

基金：

俄罗斯科学基金会;

关键词：

Aluminum thin-film filter; Cap layers; Film strength; Bulge test; EXTREME-ULTRAVIOLET; EUV; AL;

D O I：

10.1016/j.tsf.2018.03.051

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper we investigated the influence of thin nanometer cap layers of aluminum nitride (AlN) and molybdenum disilicide (MoSi2) on the temporal stability of transmission and the ultimate strength of aluminum (Al) film filters. An increase in the stability of the optical characteristics and in the mechanical strength of Al films both with AlN and MoSi2 cap layers are shown in comparison with a monolayer Al film. The greatest efficiency was demonstrated in the case of Al with MoSi2 cap layers. The obtained results show that the presence of MoSi2 cap layers 2.5 nm thick on each side of an Al film significantly reduces (for example, by > 4 times at the wavelength of 30.4 nm) the rate of film transmission loss in the extreme ultraviolet (EUV) range. In addition, the presence of cap layers can lead to a significant increase in the film's strength: the results of pressure bulge tests show that the Al with MoSi2 cap layers film can withstand an ultimate load 1.5 times greater than an Al monolayer film of comparable thickness. The carried- out bulge tests indicate that an increase in the strength of the Al thin film in the presence of MoSi2 cap layers may be due to the cap layers hindering crack initiation, which allows Al film to be plastically deformed. Acoustic tests of Al with MoSi2 cap layers filters indicate the possibility of their use as entrance filters on a supporting mesh with a mesh size up to 10mm in solar telescopes.

引用

页码：359 / 364

页数：6

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