AlN/ZnO/diamond structure combining isolated and surface acoustic waves

被引：25
作者：
Elmazria, Omar [1 ]
Zhgoon, Sergei [2 ]
Le Brizoual, Laurent [3 ]
Sarry, Frederic [1 ]
Tsimbal, Dmitry [2 ]
Djouadi, Mohammed Abdou [3 ]
机构：
[1] Nancy Univ, CNRS, UMR 7198, Inst Jean Lamour, F-54506 Vandoeuvre Les Nancy, France
[2] Moscow Power Res Inst, Moscow 111250, Russia
[3] Univ Nantes, Inst Mat Jean Rouxel IMN, CNRS, F-44322 Nantes, France
来源：
APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 23期
关键词：
INTERFACE;
D O I：
10.1063/1.3270536
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In order to generate surface acoustic waves (SAW) and waveguiding layer acoustic waves (WLAW) simultaneously, a multilayer structure of AlN/ZnO/diamond has been proposed. This structure has been investigated theoretically (two-dimensional finite element method) and experimentally. The nature of the excited modes and their order were identified by modeling and confirmed experimentally by measuring the frequency response of the device in the air and in contact with the liquid. The demonstrated structure can be used to realize a packageless sensor or resonator, using the WLAW alone. A temperature compensated gas or liquid sensor can also be realized by combined usage of the SAW and the WLAW. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3270536]
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页数：3
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