Measuring the temperature of microparticles in plasmas

被引：21

作者：

Maurer, Horst ^{[1
]}

Basner, Ralf ^{[1
]}

Kersten, Holger ^{[2
]}

机构：

[1] INP Greifswald, D-17489 Greifswald, Germany

[2] IEAP Kiel, D-24098 Kiel, Germany

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2008年 / 79卷 / 09期

关键词：

D O I：

10.1063/1.2987688

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Temperature sensitive features of particular phosphors were utilized for measuring the temperature T(p) of microparticles, confined in the sheath of a rf plasma. The experiments were performed under variation of argon pressure and rf power of the process plasma. Tp has been determined by evaluation of characteristic fluorescent lines. The results for Tp measurements are strongly dependent on rf power and gas pressure. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2987688]

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页数：4

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