Ferroelectric properties of Au/Bi3.25La0.75Ti3O12/ITO thin film capacitors

被引:0
作者
Pak, J [1 ]
Nam, K [1 ]
Lee, J [1 ]
Park, G [1 ]
机构
[1] Sogang Univ, Dept Phys, Seoul 121742, South Korea
关键词
FRAM; Bi3.25La0.75Ti3O12; ferroelectric properties; fatigue;
D O I
10.1080/00150190500311516
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Characterizations on the crystallization, chemical composition and electrical property of pulsed laser deposited Bi-3.25 La-0.75 Ti-3 O-12 thin film with a thickness of 200 nm was investigated under various post-annealing treatments. Films annealed at 650 degrees C showed a relatively large ferroelectric property compared to other films, consisting with remnant polarization and coercive field values of 14 similar to 16 mu C /cm(2) and 90 similar to 100 kV/cm, respectively. The films were found to be fatigue resistive but their hysteresis loops before and after undergoing 1 x 10(11) switching cycles showed a shift to the positive field. The n-type semiconducting property of the ITO electrode seems to be the main reason for concentrating the polarity to the positive electric field.
引用
收藏
页码:121 / 125
页数:5
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