Phase-shifting interferometry with feedback control using heterodyne phase detection

被引：13

作者：

Bitou, Youichi ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058563, Japan

来源：

OPTICS LETTERS | 2008年 / 33卷 / 16期

关键词：

D O I：

10.1364/OL.33.001777

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A phase-shifting interferometer with feedback control using heterodyne phase detection was developed. A composite heterodyne phase detection method for obtaining feedback signals was proposed. Interference fringe stabilization and accurate pi/2 phase shifts under micrometer-order vibrations were successfully demonstrated using a digital high-speed lock-in amplifier. (C) 2008 Optical Society of America.

引用

页码：1777 / 1779

页数：3

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