Strain-Induced Modulation of Resistive Switching Temperature in Epitaxial VO2 Thin Films on Flexible Synthetic Mica

被引:9
作者
Arata, Yuta [2 ]
Nishinaka, Hiroyuki [1 ]
Takeda, Minoru [1 ]
Kanegae, Kazutaka [1 ]
Yoshimoto, Masahiro [1 ]
机构
[1] Kyoto Inst Technol, Fac Elect Engn & Elect, Kyoto 6068585, Japan
[2] Kyoto Inst Technol, Dept Elect, Kyoto 6068585, Japan
来源
ACS OMEGA | 2022年 / 7卷 / 45期
关键词
METAL-INSULATOR-TRANSITION; PULSED-LASER DEPOSITION; PHASE-TRANSITION; ELECTRICAL-PROPERTIES; GROWTH; SEMICONDUCTOR; NANOBEAM; OXIDES; VAN;
D O I
10.1021/acsomega.2c06062
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The resistive switching temperature associated with the metal-insulator transition (MIT) of epitaxial VO2 thin films grown on flexible synthetic mica was modulated by bending stress. The resistive switching temperature of polycrystalline VO2 and V2O5 thin films, initially grown on synthetic mica without a buffer layer, was observed not to shift with bending stress. By inserting a SnO2 buffer layer, epitaxial growth of the VO2 (010) thin film was achieved, and the MIT temperature was found to vary with the bending stress. Thus, it was revealed that the bending response of the VO2 thin film depends on the presence or absence of the SnO2 buffer layer. The bending stress applied a maximum in-plane tensile strain of 0.077%, resulting in a high-temperature shift of 2.3 degrees C during heating and 1.8 degrees C during cooling. After 104 bending cycles at a radius of curvature R = 10 mm, it was demonstrated that the epitaxial VO2 thin film exhibits resistive switching temperature associated with MIT.
引用
收藏
页码:41768 / 41774
页数:7
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