Microstructure and phase evolution of SrTiO3 thin films on Si prepared by the use of polymeric precursors

被引:37
作者
Zanetti, SM
Longo, E
Varela, JA
Leite, ER
机构
[1] UNIV FED SAO CARLOS, DEPT QUIM, BR-13560905 SAO CARLOS, SP, BRAZIL
[2] UNESP, INST QUIM, BR-14801970 ARARAQUARA, SP, BRAZIL
关键词
SrTiO3; thin films; Pechini technique; microstructure; strontium carbonate; titanium citrate solutions; Si substrates;
D O I
10.1016/S0167-577X(96)00267-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The use of polymeric precursors was employed in preparing SrTiO3 thin films by dip coating using Si (111) as substrate. Crack free films were obtained after sintering at temperatures ranging from 550 to 1000 degrees C. The microstructure, characterized by SEM, shows the development of dense polycrystalline films with smooth surface and mean grain size of 52 nm, for films sintered at 1000 degrees C, Grazing incident angle XRD characterization of these films shows that the SrTiO3 phase crystallizes from an inorganic amorphous matrix. No intermediate crystalline phase was identified.
引用
收藏
页码:173 / 178
页数:6
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