Electrostatically-driven-leverage actuator as an engine for out-of-plane motion

被引：0

作者：

Lin, HY ^{[1
]}

Hu, HH ^{[1
]}

Fang, WL ^{[1
]}

Huang, RS ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

electrostatically-driven-leverage actuator (EDLA); MOSBE processes; air exhaust groove;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

An Electrostatic al ly-Driven-Leverage actuator (EDLA Engine) is proposed as an elementary actuation unit for out-of-plane motion. The EDLA Engine consists of a near-gap electrode and a rigid lever-mechanism. The lever-mechanism magnify the motion of the electrode; thus, the EDLA Engine has a large displacement (> 15 mum) and a low driving voltage (< 25 Volt). To improve the performances of EDLA Engine, the shape of electrodes was modified and air exhaust grooves was added on the substrate. Since the EDLA Engine can be integrated with passive elements for various applications, it is regarded as a universal out-of-plane engine.

引用

页码：740 / 743

页数：4

共 50 条

[1] A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion
Nabavi, Seyedfakhreddin
Menard, Michael
Nabki, Frederic
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022, 31 (05) : 820 - 829
[2] Out-of-Plane Motion of a Planar Dielectric Elastomer Actuator with Distributed Stiffeners
Lai, William
Bastawros, Ashraf F.
Hong, Wei
ELECTROACTIVE POLYMER ACTUATORS AND DEVICES (EAPAD) 2012, 2012, 8340
[3] An electro-thermally driven microactuator with bilateral motion in plane and out-of-plane
Pan, CH
Tyan, SY
MHS2001: PROCEEDINGS OF THE 2001 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 2001, : 135 - 142
[4] A large Out-of-plane Motion Microcantilever Driven by Small In-plane Actuation
Chen, Xing
Lee, Dong-Weon
APPLIED ELECTROMAGNETICS AND MECHANICS (II), 2009, 13 : 367 - 368
[5] An out-of-plane electro-thermal polymer actuator
Zhang, Dan
Ding, Guifu
Zhu, Lida
Cheng, Jifeng
2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2008, : 647 - 650
[6] Magnetic, out-of-plane, totaly integrated bistable μ-actuator
Rostaing, H
Stepanek, J
Cugat, O
Dieppedale, C
Delamare, J
Transducers '05, Digest of Technical Papers, Vols 1 and 2, 2005, : 1366 - 1370
[7] An out-of-plane electrostatic actuator based on the lever principle
Ren, Hao
Tao, Fenggang
Wang, Weimin
Yao, Jun
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (04)
[8] A high-force, out-of-plane actuator with a MEMS-enabled microscissor motion amplifier
Xie, Xin
Livermore, Carol
15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015), 2015, 660
[9] Out-of-plane vibration of an electrostatically actuated microbeam immersed in flowing fluid
Rezaee, Mousa
Sharafkhani, Naser
NONLINEAR DYNAMICS, 2020, 102 (01) : 1 - 17
[10] Out-of-plane vibration of an electrostatically actuated microbeam immersed in flowing fluid
Mousa Rezaee
Naser Sharafkhani
Nonlinear Dynamics, 2020, 102 : 1 - 17

← 1 2 3 4 5 →