On the optical stability of high-resolution transmission electron microscopes

被引:33
作者
Barthel, J. [1 ,3 ]
Thust, A. [2 ,3 ]
机构
[1] Aachen Univ RWTH, Cent Facil Electron Microscopy GFE, D-52074 Aachen, Germany
[2] Forschungszentrum Julich, Peter Grunberg Inst, D-52425 Julich, Germany
[3] Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Electrons ER C, D-52425 Julich, Germany
关键词
HRTEM; Electron optics; Aberrations; Aberration correction; Astigmatism; Stability; Optical lifetime; SPHERICAL-ABERRATION;
D O I
10.1016/j.ultramic.2013.05.001
中图分类号
TH742 [显微镜];
学科分类号
摘要
In the recent two decades the technique of high-resolution transmission electron microscopy experienced an unprecedented progress through the introduction of hardware aberration correctors and by the improvement of the achievable resolution to the sub-Angstrom level. The important aspect that aberration correction at a given resolution requires also a well defined amount of optical stability has received little attention so far. Therefore we investigate the qualification of a variety of high-resolution electron microscopes to maintain an aberration corrected optical state in terms of an optical lifetime. We develop a comprehensive statistical framework for the estimation of the optical lifetime and find remarkably low values between tens of seconds and a couple of minutes. Probability curves are introduced, which inform the operator about the chance to work still in the fully aberration corrected state. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:6 / 17
页数:12
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