Structure and properties of nanocomposite Mo-Si-B-(N) coatings

被引：16

作者：

Kiryukhantsev-Korneev, Ph. V. ^{[1
]}

Bondarev, A. V. ^{[1
]}

Shtansky, D. V. ^{[1
]}

Levashov, E. A. ^{[1
]}

机构：

[1] Natl Univ Sci & Technol MISiS, Moscow 119049, Russia

来源：

PROTECTION OF METALS AND PHYSICAL CHEMISTRY OF SURFACES | 2015年 / 51卷 / 05期

关键词：

TEMPERATURE OXIDATION RESISTANCE; SI-B-N; THERMAL-STABILITY; MECHANICAL-PROPERTIES; C-N; AL; FILMS; DISCHARGE; CRN; TIN;

D O I：

10.1134/S2070205115050160

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

Coatings in the Mo-Si-B-(N) system are obtained using the magnetron sputtering method. Control of nitrogen and silicon content in the coatings is carried out using various gaseous Ar + N-2 mixtures and variation of the number of Si segments in the area of MoSiB target erosion. The structure of coatings is studied using methods of scanning and transmission electron microscopy, X-ray analysis, infrared and optical emission spectroscopy, and Raman spectroscopy. Mechanical and tribological properties of the coatings are determined using methods of nanoindentation, scratch-testing, and tribological testing at temperatures of 25, 500, and 700A degrees C. The oxidation resistance of coatings is studied. It is established that coatings with maximum Si and N content possess the best properties: hardness of 32 GPa, elastic recovery of 66%, low friction coefficient at high temperatures, and heat resistance up to 1200A degrees C.

引用

页码：794 / 802

页数：9

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