共 14 条
[1]
BAKASHI V, 2005, SPIE BELLINGHAM, P27
[2]
EDMUNDSON PF, 2000, THESIS KINGS COLL LO
[4]
GRAF T, 2004, THESIS KINGS COLL LO
[7]
KORTRIGHT JB, 2010, P SOC PHOTO-OPT INS, V2010, P160
[8]
Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet
[J].
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS,
2012, 11 (04)
[9]
MICHETTE AG, 2003, OPTICS ENCY, P3305