Comment on "Bulk Acoustic Wave Analysis of Crystalline-Plane-Oriented Aluminum Nitride Films" [Jpn. J. Appl. Phys. 46, 6719 (2007)]

被引：1
|
作者：
Ballato, Arthur [1 ]
机构：
[1] Clemson Univ, Dept Elect & Comp Engn, Clemson, SC 29634 USA
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2015年 / 54卷 / 09期
关键词：
D O I：
10.7567/JJAP.54.099101
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页数：2
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