Efficient all-solid-state 213 nm laser source for microlithography

被引：0
|
作者：
Kubota, S [1 ]
Wiechmann, W [1 ]
Liu, LY [1 ]
Oka, M [1 ]
Kikuchi, H [1 ]
Suganuma, H [1 ]
Masuda, H [1 ]
Takeda, M [1 ]
机构：
[1] SONY CORP,RES CTR,KUBOTA OPTOELECT LAB,SHINAGAWA KU,TOKYO 141,JAPAN
来源：
OPTICAL MICROLITHOGRAPHY IX | 1996年 / 2726卷
关键词：
frequency-quintupled Q-sw Nd:YAG laser; repetition rate; microlithography; pump depletion;
D O I：
10.1117/12.240946
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：841 / 846
页数：6
相关论文
共 50 条
  • [31] ULTRAFAST ALL-SOLID-STATE LASER TECHNOLOGY
    KELLER, U
    APPLIED PHYSICS B-LASERS AND OPTICS, 1994, 58 (05): : 347 - 363
  • [32] All-solid-state Nd:YVO4 laser at 1342 nm under 914 nm diode laser pumping
    Li, Y. L.
    Liu, J. Y.
    Zhang, Y. C.
    Zhang, T. Y.
    Ni, T. Y.
    Tao, Z. H.
    LASER PHYSICS, 2012, 22 (02) : 343 - 346
  • [33] Inactivation Effect of All-Solid-State 228 nm Far-UVC Pulsed Laser
    Zhibin, Zhao
    Cheng, Cheng
    Yinghong, Jin
    Wenbo, Zeng
    Qinlong, Jin
    Quan, Li
    Jiaojiao, Li
    Yi, Qu
    Baoxue, Bo
    Zhongguo Jiguang/Chinese Journal of Lasers, 2022, 49 (15):
  • [34] High pulse repetition frequency all-solid-state 1053 nm Nd:YLF laser
    Sun, Y.
    Zhang, H.
    Liu, Q.
    Huang, L.
    Wang, Y.
    Gong, M.
    LASER PHYSICS LETTERS, 2010, 7 (10) : 722 - 725
  • [35] An efficient all-solid-state doubly resonant sum-frequency continuous-wave ultraviolet laser at 299 nm
    Liu, B.
    Huo, Y.
    Shi, J. F.
    Li, Y. L.
    LASER PHYSICS LETTERS, 2013, 10 (08)
  • [36] All-solid-state multi-wavelength laser system from 208 to 830 nm
    Zhao, SH
    Chen, GF
    Zhao, W
    Wang, YS
    Yu, LJ
    CHINESE PHYSICS LETTERS, 2001, 18 (04) : 537 - 538
  • [37] Research on All-solid-state Continuous-wave 228 nm Deep Ultraviolet Laser
    Zhao Zhibin
    Cheng Cheng
    Li Quan
    Xu Dongxin
    Chen Hao
    Liu Guojun
    Qiao Zhongliang
    Wang Debo
    Zheng Quan
    Qu Yi
    Bo Baoxue
    ACTA PHOTONICA SINICA, 2022, 51 (09)
  • [38] Development of Separation Film for Frequency Doubling in 278 nm All-Solid-State Laser System
    Fu Xiuhua
    Chen Cheng
    Hu Zhanggui
    Xiong Shifu
    Zhang Jing
    Wang Fei
    Wang Chenxin
    CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2019, 46 (12):
  • [39] 800 mJ high beam all-solid-state 1319 1319 nm pulsed laser
    Li, Nan
    Pang, Yu
    Lu, Yanhua
    Zhang, Lei
    Xie, Gang
    Wang, Weimin
    Xu, Xiaoxiao
    Zhongguo Jiguang/Chinese Journal of Lasers, 2013, 40 (08):
  • [40] All-solid-state low noise Yb:YAG/LBO green laser at 515 nm
    Liu, Qianqian
    Yang, Min
    Yao, Yi
    Zhao, Ling
    Li, Bin
    Qu, Dapeng
    Zheng, Quan
    OPTICS AND SPECTROSCOPY, 2013, 115 (01) : 137 - 139
12345