Graphical peak analysis method for determining densities and emission rates of traps in dielectric film from transient discharge current

被引：17

作者：

Matsuura, H

Hase, T

Sekimoto, Y

Uchikura, M

Simizu, M

机构：

[1] Osaka Electrocommun Univ, Dept Elect, Osaka 5728530, Japan

[2] Himeji Inst Technol, Dept Elect, Himeji, Hyogo 6712201, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2002年 / 91卷 / 04期

关键词：

D O I：

10.1063/1.1429768

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The purpose of this study is to propose and test the graphical peak analysis method [discharge current transient spectroscopy (DCTS)] for determining the densities and emission rates of traps in a dielectric thin film from the transient discharge current I-dis(t) in a capacitor at a constant temperature, different from thermally stimulated current (TSC). It is theoretically demonstrated that DCTS can distinguish among traps with close emission rates. Experimentally, the densities and emission rates of five traps in Pb(Zr, Ti)O-3 thin films are determined using DCTS. Here, these five emission rates are between 1x10(-3) s(-1) and 7x10(-2) s(-1). One kind of trap, which was determined by TSC under the assumption of one emission rate, is found to be distinguished into five kinds of traps with close emission rates by DCTS. (C) 2002 American Institute of Physics.

引用

页码：2085 / 2092

页数：8

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