CVD growth of fingerprint-like patterned 3D graphene film for an ultrasensitive pressure sensor

被引:197
作者
Xia, Kailun
Wang, Chunya
Jian, Muqiang
Wang, Qi
Zhang, Yingying [1 ]
机构
[1] Tsinghua Univ, Key Lab Organ Optoelect & Mol Engn, Minist Educ, Dept Chem, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
electronic skin; flexible pressure sensor; three-dimensional (3D) graphene film; fingertip skin; hierarchical structures; HUMAN-MOTION DETECTION; STRETCHABLE ELECTRONICS; STRAIN SENSOR; SKIN; ENERGY; TRANSPARENT; SENSITIVITY; COMPOSITE; CARBON; CONDUCTORS;
D O I
10.1007/s12274-017-1731-z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
With the rapid development of wearable devices, flexible pressure sensors with high sensitivity and wide workable range are highly desired. In nature, there are many well-adapted structures developed through natural selection, which inspired us for the design of biomimetic materials or devices. Particularly, human fingertip skin, where many epidermal ridges amplify external stimulations, might be a good example to imitate for highly sensitive sensors. In this work, based on unique chemical vapor depositions (CVD)-grown 3D graphene films that mimic the morphology of fingertip skin, we fabricated flexible pressure sensing membranes, which simultaneously showed a high sensitivity of 110 (kPa)(-1) for 0-0.2 kPa and wide workable pressure range (up to 75 kPa). Hierarchical structured PDMS films molded from natural leaves were used as the supporting elastic films for the graphene films, which also contribute to the superior performance of the pressure sensors. The pressure sensor showed a low detection limit (0.2 Pa), fast response (< 30 ms), and excellent stability for more than 10,000 loading/unloading cycles. Based on these features, we demonstrated its applications in detecting tiny objects, sound, and human physiological signals, showing its potential in wearable electronics for health monitoring and human/machine interfaces.
引用
收藏
页码:1124 / 1134
页数:11
相关论文
共 50 条
  • [31] Surface patterned hydrogel film as a flexible scaffold for 2D and 3D cell co-culture
    Zhu, Feiyan
    Chen, Ying
    Yang, Saina
    Wang, Qian
    Liang, Fuxin
    Qu, Xiaozhong
    Hu, Zhongbo
    RSC ADVANCES, 2016, 6 (66): : 61185 - 61189
  • [32] A multifunctional skin-like sensor based on a 3D printed thermo-responsive hydrogel
    Lei, Zhouyue
    Wang, Quankang
    Wu, Peiyi
    MATERIALS HORIZONS, 2017, 4 (04) : 694 - 700
  • [33] Ultrasensitive room temperature NH3 sensor based on a graphene-polyaniline hybrid loaded on PET thin film
    Bai, Shouli
    Zhao, Yangbo
    Sun, Jianhua
    Tian, Ye
    Luo, Ruixian
    Li, Dianqing
    Chen, Aifan
    CHEMICAL COMMUNICATIONS, 2015, 51 (35) : 7524 - 7527
  • [34] 3D porous graphene/NiCo2O4 hybrid film as an advanced electrode for supercapacitors
    Zhou, You
    Huang, Zhengyong
    Liao, Huijun
    Li, Jian
    Wang, Hanxiang
    Wang, Yu
    APPLIED SURFACE SCIENCE, 2020, 534 (534)
  • [35] 3D printing wide detection range and high sensitivity flexible pressure sensor and its applications
    Gao, Zhiyi
    Zhang, Qi
    Wang, Yuwei
    Zhang, Wuxu
    Liu, Jinyun
    Xu, Dan
    Xia, Xiangling
    Hu, Siqi
    Bian, Baoru
    Zhao, Yongqing
    Wu, Yuanzhao
    Liu, Yiwei
    Shang, Jie
    Li, Run-Wei
    REACTIVE & FUNCTIONAL POLYMERS, 2024, 196
  • [36] 3D Printing of a Flexible Inclined-Tip Cone Array-Based Pressure Sensor
    Li, Tong
    Pan, Peng
    Yang, Zhengchun
    Wei, Jun
    Yang, Xiaoping
    Liu, Jun
    Zhou, Jie
    Zhang, Xiaodong
    Liu, Guanying
    ADVANCED MATERIALS TECHNOLOGIES, 2022, 7 (06):
  • [37] Microstructuring Polydimethylsiloxane Elastomer Film with 3D Printed Mold for Low Cost and High Sensitivity Flexible Capacitive Pressure Sensor
    Zhuo, Bengang
    Chen, Sujie
    Guo, Xiaojun
    2017 IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM), 2017, : 148 - 149
  • [38] Porous fiber paper and 3D patterned electrodes composed high-sensitivity flexible piezoresistive sensor for physiological signal monitoring
    Hou, XiaoJuan
    Zhong, JiXin
    He, Jian
    Yang, ChangJun
    Yu, JunBin
    Mei, LinYu
    Mu, JiLiang
    Geng, WenPing
    Chou, XiuJian
    SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2022, 65 (05) : 1169 - 1178
  • [39] 3D printed graphene/polydimethylsiloxane composite for stretchable strain sensor with tunable sensitivity
    Wang, Zhenyu
    Zhang, Qiang
    Yue, Yunong
    Xu, Jiawen
    Xu, Wei
    Sun, Xinhu
    Chen, Yanqiu
    Jiang, Jin
    Liu, Yu
    NANOTECHNOLOGY, 2019, 30 (34)
  • [40] Intrinsically Stretchable Motion Sensor Enabled by 3D Graphene Foam Integrated Hydrogel
    Sheng, Wei
    Zhou, Jianxin
    Jia, Yuxi
    Li, Wentao
    Qiao, Ruixi
    Liu, Zixi
    Xu, Wenjie
    Zhang, Tao
    SMALL, 2025, 21 (08)