Design and Dynamic Response Analysis of A Flexure-Based Nano-positioning System

被引：0
|
作者：
Wu, Dingbing [1 ,2 ]
Zhang, Chi [1 ]
Yang, Aolei [2 ]
Yang, Guilin [1 ]
Dong, Liang [1 ,2 ]
Liu, Qiang [1 ]
机构：
[1] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Beijing 100864, Peoples R China
[2] Shanghai Univ, Sch Mechatron Engn & Automat, Shanghai 200041, Peoples R China
来源：
PROCEEDINGS OF THE 2016 IEEE 11TH CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS (ICIEA) | 2016年
关键词：
nano-positioning; complex parallel four-bar mechanism; finite element analysis; modal analysis;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper proposes a nano-positioning system driven by a high force density voice coil motor (VCM) and supported by a complex parallel four-bar flexure mechanism. The VCM employs bilateral Halbach permanent magnet (PM) arrays and triple-segment coils to achieve high force-current ratio and low force ripple. Complex parallel four-bar flexure mechanism is designed to obtain high stiffness and good dynamic performance. The stiffness model of the positioning system is derived with analytical method. The finite element analysis (FEA) shows that the stiffness is approximately linear within the elastic deformation. On the other hand, the vibration modal of the nano-positioning system is analyzed with hammering test with LMS test. lab, FEA and sine-sweep frequency test respectively. The analysis and experimental results prove the dynamic responses and vibration modes derived from these three methods are nearly identical, and the first-order resonance frequency is highly increased.
引用
收藏
页码：2456 / 2461
页数：6
相关论文
共 50 条
  • [41] Dynamic Response Analysis of Overpass Ramp Based on Grey System Theory Model
    Ji, Yongcheng
    Liao, Guangwen
    Xu, Wenyuan
    Applied Sciences (Switzerland), 2024, 14 (24):
  • [42] Dynamic Response Analysis of Motorized Spindle System
    ZHANG Li
    LUO Yi-chao
    XU Juan
    XIAO Ru-feng
    LI Xian-hui
    ComputerAidedDrafting,DesignandManufacturing, 2013, (02) : 62 - 65
  • [43] A Dynamic Response Analysis of Vehicle Suspension System
    Lopes, Rogerio
    Farahani, Behzad V. V.
    de Melo, Francisco Queiros
    Moreira, Pedro M. G. P.
    APPLIED SCIENCES-BASEL, 2023, 13 (04):
  • [44] Design sensitivity analysis of dynamic response of nonviscously damped systems
    Li, Li
    Hu, Yujin
    Wang, Xuelin
    MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2013, 41 (1-2) : 613 - 638
  • [45] ANALYSIS OF PEAR DYNAMIC CHARACTERISTICS BASED ON HARMONIC RESPONSE
    Zhang, W.
    Cui, D.
    Liu, Z.
    Ying, Y.
    TRANSACTIONS OF THE ASABE, 2016, 59 (06) : 1905 - 1913
  • [46] Adaptable dynamic design platform based on CAX/PDM system
    Li, Yu
    Wang, Taiyong
    Ge, Yingming
    MANUFACTURING PROCESS AND EQUIPMENT, PTS 1-4, 2013, 694-697 : 168 - 171
  • [47] Optimization design for downhole dynamic seal based on response surface method
    Zhang, Yi
    Zhang, Xiaodong
    Yang, Lin
    Yu, Xin
    ADVANCES IN MECHANICAL ENGINEERING, 2019, 11 (02)
  • [48] Analysis of the novel flexure parallel micromanipulators based on multi-level displacement amplifier with/without symmetrical design
    Dan Zhang
    Zhen Gao
    Matteo Malosio
    Gianmarc Coppola
    International Journal of Mechanics and Materials in Design, 2012, 8 : 311 - 325
  • [49] Analysis of the novel flexure parallel micromanipulators based on multi-level displacement amplifier with/without symmetrical design
    Zhang, Dan
    Gao, Zhen
    Malosio, Matteo
    Coppola, Gianmarc
    INTERNATIONAL JOURNAL OF MECHANICS AND MATERIALS IN DESIGN, 2012, 8 (04) : 311 - 325
  • [50] Dynamic response analysis of generally damped linear system with repeated eigenvalues
    Yu, Rui-fang
    Zhou, Xi-yuan
    Yuan, Mei-qiao
    STRUCTURAL ENGINEERING AND MECHANICS, 2012, 42 (04) : 449 - 469
12345