Design and Dynamic Response Analysis of A Flexure-Based Nano-positioning System

被引：0

作者：

Wu, Dingbing ^{[1
,2
]}

Zhang, Chi ^{[1
]}

Yang, Aolei ^{[2
]}

Yang, Guilin ^{[1
]}

Dong, Liang ^{[1
,2
]}

Liu, Qiang ^{[1
]}

机构：

[1] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Beijing 100864, Peoples R China

[2] Shanghai Univ, Sch Mechatron Engn & Automat, Shanghai 200041, Peoples R China

来源：

PROCEEDINGS OF THE 2016 IEEE 11TH CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS (ICIEA) | 2016年

关键词：

nano-positioning; complex parallel four-bar mechanism; finite element analysis; modal analysis;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposes a nano-positioning system driven by a high force density voice coil motor (VCM) and supported by a complex parallel four-bar flexure mechanism. The VCM employs bilateral Halbach permanent magnet (PM) arrays and triple-segment coils to achieve high force-current ratio and low force ripple. Complex parallel four-bar flexure mechanism is designed to obtain high stiffness and good dynamic performance. The stiffness model of the positioning system is derived with analytical method. The finite element analysis (FEA) shows that the stiffness is approximately linear within the elastic deformation. On the other hand, the vibration modal of the nano-positioning system is analyzed with hammering test with LMS test. lab, FEA and sine-sweep frequency test respectively. The analysis and experimental results prove the dynamic responses and vibration modes derived from these three methods are nearly identical, and the first-order resonance frequency is highly increased.

引用

页码：2456 / 2461

页数：6

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