Understanding on the current-induced crystallization process and faster set write operation thereof in non-volatile phase change memory

被引:10
作者
Kang, Dae-Hwan [1 ]
Kim, Nan Young [1 ]
Jeong, Hongsik [1 ]
Cheong, Byung-ki [2 ]
机构
[1] Samsung Elect Co Ltd, Memory Div, Semicond Business, Yongin 449711, Gyunggi Do, South Korea
[2] Korea Inst Sci & Technol, Thin Film Mat Res Ctr, Seoul 136791, South Korea
关键词
Nucleation - Tellurium compounds - Solvents - Antimony compounds - Germanium compounds;
D O I
10.1063/1.3684245
中图分类号
O59 [应用物理学];
学科分类号
摘要
We experimentally demonstrate that the crystallization process of Ge-Sb-Te crystallites during the set operation in non-volatile phase change memory commences after threshold switching event. It is also shown that the nucleation and growth rates have opposite behaviors with the increase of set operation power: the incubation time in nucleation stage can be minimized at higher power, whereas the percolation time in growth stage is smaller at lower power. Based on these results, we introduce a two-step set pulse of high-power nucleation and low-power growth making the set write operation much faster than conventional simple rectangular or slow-quenched form. (C) 2012 American Institute of Physics. [doi:10.1063/1.3684245]
引用
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页数:3
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