Fabrication of beryllium capsules with copper-doped layers for NIF targets: A progress report

被引:22
作者
McElfresh, Michael [1 ]
Gunther, Janelle
Alford, Craig
Fought, Eric
Cook, Robert
机构
[1] Lawrence Livermore Natl Lab, Livermore, CA 94550 USA
[2] Gen Atom Co, San Diego, CA 92186 USA
[3] Los Alamos Natl Lab, Los Alamos, NM 87544 USA
关键词
D O I
10.13182/FST49-786
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
The sputtering of beryllium (Be) has been used at LLNL for nearly 30 years in the fabrication of laser targets. Several years ago the prospect of using sputtering to fabricate spherical Be capsules for National Ignition Facility (NIF) targets began to be explored and a basic strategy was developed that involved sputtering down onto plastic mandrels bouncing in a pan. While this appears to be very straight forward in principle, in practice sputtering has been used almost exclusively to make thin films (< 1 micron) on flat substrates. Thick films pose a significant challenge for sputtering while materials on spherical substrates are essentially unexplored. More recently, based on computational results, the point design for the first NIF ignition target capsule was specified as a Be capsule with Cu-doped layers of specific thickness, each layer with a different concentration of copper. While the work described here was motivated by the need to make these layered capsules, progress has been made in developing a more complete metallurgical understanding of the materials that are fabricated and the relationship between the sputter processing and microstructure of these spherical samples.
引用
收藏
页码:786 / 795
页数:10
相关论文
共 10 条
[1]  
BEAT T, COMMUNICATION
[2]  
FIELD RW, UNPUB
[3]  
HOPPE M, UNPUB
[4]  
MCEACHERN R, 2003, P SOC PHOTO-OPT INS, V5228, P692
[5]   THE DESIGN, PERFORMANCE, AND APPLICATION OF AN ATOMIC-FORCE MICROSCOPE-BASED PROFILOMETER [J].
MCEACHERN, RL ;
MOORE, CE ;
WALLACE, RJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :983-989
[6]   The PAMS/GDP process for production of ICF target mandrels [J].
McQuillan, BW ;
Nikroo, A ;
Steinman, DA ;
Elsner, FH ;
Czechowicz, DG ;
Hoppe, ML ;
Sixtus, M ;
Miller, WJ .
FUSION TECHNOLOGY, 1997, 31 (04) :381-384
[7]   The National Ignition Facility [J].
Miller, GH ;
Moses, EI ;
Wuest, CR .
OPTICAL ENGINEERING, 2004, 43 (12) :2841-2853
[8]   Developing a viable multilayer coating process for extreme ultraviolet lithography reticles [J].
Mirkarimi, PB ;
Spiller, E ;
Baker, SL ;
Sperry, V ;
Stearns, DG ;
Gullikson, EM .
JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS, 2004, 3 (01) :139-145
[9]   Progress in 2 mm glow discharge polymer mandrel development for NIF [J].
Nikroo, A ;
Bousquet, J ;
Cook, R ;
McQuillan, BW ;
Paguio, R ;
Takagi, M .
FUSION SCIENCE AND TECHNOLOGY, 2004, 45 (02) :165-170
[10]   Characterization specifications for baseline indirect drive NIF targets [J].
Stephens, RB ;
Haan, SW ;
Wilson, DC .
FUSION SCIENCE AND TECHNOLOGY, 2002, 41 (03) :226-233