In situ RBS measurements for the effect of swift heavy ion irradiation on metal-insulator interfaces

被引：3

作者：

Hayashi, M. ^{[1
]}

Matsuda, M. ^{[2
]}

Asozu, T. ^{[2
]}

Sataka, M. ^{[2
]}

Nakamura, M. ^{[2
]}

Iwase, A. ^{[1
]}

机构：

[1] Osaka Prefecture Univ, Dept Mat Sci, Sakai, Osaka 5998531, Japan

[2] Japan Atom Energy Agcy, Tokai, Ibaraki 3191195, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2013年 / 314卷

关键词：

In situ RBS; Atomic mixing; Electronic excitation; Metal-insulator interfaces; Swift heavy ions; DIFFUSION; CRYSTAL;

D O I：

10.1016/j.nimb.2013.05.046

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have studied the effect of 200 MeV Xe ion irradiation on Bi-Al2O3 and Au-Al2O3 interfaces by means of in situ Rutherford backscattering spectrometry (RBS). For the Bi-Al2O3 interface, we could observe a systematic change in RBS spectrum as a function of Xe ion fluence or the irradiation time. On the other hand, for Au-Al2O3 system, we could not observe any change in RBS spectrum. The experimental result confirmed our previous result that atomic mixing at Bi-Al2O3 interface surely occurs by the Xe ion irradiation. We analyzed the RBS spectra by the simulation software SIMNRA, and discussed the Bi-Al2O3 mixing quantitatively. From the irradiation time dependence of the mixing layer thickness, we estimated the effective diffusion constant for the atomic mixing at Bi-Al2O3 interface. Its value corresponds to the self-diffusion near the melting temperature of Al2O3. The result implies that Bi and Al2O3 are in molten forms during the ion irradiation, resulting in the atomic mixing at Bi-Al2O3 interface. (C) 2013 Published by Elsevier B.V.

引用

页码：176 / 179

页数：4

共 15 条

[1]

[Anonymous], 2005, NUCL INSTR METH B, VB230

[2]

[Anonymous], 2006, NUCL INSTR METH B, VB245

[3]

[Anonymous], 2009, NUCL INSTR METH, V267

[4] High-pressure synthesis, crystal structures, and properties of perovskite-like BiAlO3 and pyroxene-like BiGaO3 [J].

Belik, AA ;

Wuernisha, T ;

Kamiyama, T ;

Mori, K ;

Maie, M ;

Nagai, T ;

Matsui, Y ;

Takayama-Muromachi, E .

CHEMISTRY OF MATERIALS, 2006, 18 (01) :133-139

[5] Mechanisms of ion beam induced atomic mixing in solids [J].

Bolse, W .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1998, 253 (1-2) :194-201

[6] ALPHA-]OMEGA PHASE-TRANSFORMATION INDUCED IN TITANIUM DURING ION IRRADIATIONS IN THE ELECTRONIC SLOWING-DOWN REGIME [J].

DAMMAK, H ;

BARBU, A ;

DUNLOP, A ;

LESUEUR, D ;

LORENZELLI, N .

PHILOSOPHICAL MAGAZINE LETTERS, 1993, 67 (04) :253-259

[7] EFFECTS INDUCED BY HIGH ELECTRONIC EXCITATIONS IN PURE METALS - A DETAILED STUDY IN IRON [J].

DUNLOP, A ;

LESUEUR, D ;

LEGRAND, P ;

DAMMAK, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 90 (1-4) :330-338

[8] Anomalous shift of Curie temperature in iron-nickel Invar alloys by high-energy heavy ion irradiation [J].

Iwase, A ;

Hamatani, Y ;

Mukumoto, Y ;

Ishikawa, N ;

Chimi, Y ;

Kambara, T ;

Müller, C ;

Neumann, R ;

Ono, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 209 :323-328

[9] ANOMALOUS REDUCTION OF STAGE-I RECOVERY IN NICKEL IRRADIATED WITH HEAVY-IONS IN THE ENERGY-RANGE 100-120 MEV [J].

IWASE, A ;

SASAKI, S ;

IWATA, T ;

NIHIRA, T .

PHYSICAL REVIEW LETTERS, 1987, 58 (23) :2450-2453

[10] Swift heavy ions induced mixing in metal/semiconductor system [J].

Kumar, Sarvesh ;

Chauhan, R. S. ;

Agarwal, D. C. ;

Kumar, Manvendra ;

Tripathi, A. ;

Bolse, W. ;

Avasthi, D. K. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (08) :1759-1763

← 1 2 →