Piezoresistive cantilever for measuring mass of airborne particles

被引：0

作者：

Chen, Sheng-Jui ^{[1
]}

Lin, Yen-Liang ^{[1
]}

Wu, Chung-Lin ^{[1
]}

机构：

[1] Ind Technol Res Inst, Ctr Measurement Stand, Hsinchu 30011, Taiwan

来源：

2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2016年

关键词：

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper introduces a piezoresistive cantilever that is designed for measuring the mass of airborne particles. The principle of mass measurement is based on measuring the frequency shift in the mechanical resonant frequency due to an additional mass deposited on the cantilever. To detect the resonant frequency, piezoresistors are fabricated on the surface of the cantilever and utilized as a strain gauge. Excitation of the cantilever is provided by an external PZT stack. Preliminary results on sensor characterization and discussion are also given in the paper.

引用

页码：678 / 680

页数：3

共 6 条

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