Detection of specular surface defects with eliminating dusts based on polarized structured-light illumination

被引:1
作者
Song, Yiping [1 ]
Yue, Huimin [1 ]
Zhou, Zheng [1 ]
Huang, Yiyang [1 ]
Fang, Yuyao [1 ]
Liu, Yong [1 ]
机构
[1] Univ Elect Sci & Technol China, Sch Optoelect Sci & Technol, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Sichuan, Peoples R China
来源
9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): OPTICAL TEST, MEASUREMENT TECHNOLOGY, AND EQUIPMENT | 2019年 / 10839卷
关键词
defects detection; specular surface; fringe reflection; polarized structured-light illumination; dusts; PHASE-MEASURING DEFLECTOMETRY; SCATTERING;
D O I
10.1117/12.2506702
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The detection of defects is one of the most crucial aspects of the manufacturing industry. There are many methods in the aspects of defects detection on the specular surface. However, in some cases, the detection results may be disturbed by the dusts on the specular surface. In this paper, a method which is based on the polarized structured-light illumination is proposed to detect the defects of specular surface with eliminating dusts. A linear polarizer is added to the structured-light illumination system, and by controlling the polarization direction of the polarizer the dusts can be detected separately and removed in the end. Experiment results proved the effectiveness of the proposed method.
引用
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页数:5
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