A study of atypical grain growth properties for SnO2 thin films

被引：13

作者：

Min, Soon ^{[1
]}

Jeong, Jin ^{[2
]}

机构：

[1] Chosun Nursing Coll, Dept Phys, Gwanju 501825, South Korea

[2] Chosun Univ, Dept Phys, Kwangju 501759, South Korea

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2013年 / 16卷 / 05期

关键词：

Thin films; SnO2; Atypical grain; Grain growth; TIN OXIDE;

D O I：

10.1016/j.mssp.2013.01.026

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

SnO2 thin films were grown on Si substrate using the chemical vapor deposition(CVD) method. The surface of the thin film was examined using a transmission electron microscope (TEM) and a scanning electron microscope (SEM). Atypical shaped grains and atypical columnar structures were observed on the SnO2 thin films that were exposed to air after first deposition and during re-deposition in anaerobic conditions in the CVD. The electrical properties of SnO2 thin films feature a lower range of resistance in single mode, but after the atypical particles appear, the electrical resistance decreased. (C) 2013 Elsevier Ltd. All rights reserved.

引用

页码：1267 / 1270

页数：4

共 14 条

[1] Transparent conducting indium zinc tin oxide anode for highly efficient phosphorescent organic light emitting diodes [J].

Bae, Jung-Hyeok ;

Moon, Jong-Min ;

Jeong, Soon Wook ;

Kim, Jang-Joo ;

Kang, Jae-Wook ;

Kim, Do-Geun ;

Kim, Jong-Kuk ;

Park, Jeong-Woo ;

Kim, Han-Ki .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 155 (01) :J1-J6

[2] Detection of gases with arrays of micromachined tin oxide gas sensors [J].

Cané, C ;

Gràcia, I ;

Götz, A ;

Fonseca, L ;

Lora-Tamayo, E ;

Horrillo, MC ;

Sayago, I ;

Robla, JI ;

Rodrigo, J ;

Gutiérrez, J .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 65 (1-3) :244-246

[3] Spin-on nanoparticle tin oxide for microhotplate gas sensors [J].

Cavicchi, RE ;

Walton, RM ;

Aquino-Class, M ;

Allen, JD ;

Panchapakesan, B .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :145-154

[4] A TIN OXIDE THIN-FILM SENSOR WITH HIGH ETHANOL SENSITIVITY [J].

FANG, YK ;

LEE, JJ .

THIN SOLID FILMS, 1989, 169 (01) :51-56

[5] Photoluminescence and structure of ZnO films deposited on Si substrates by metal-organic chemical vapor deposition [J].

Fu, ZX ;

Lin, BX ;

Zu, J .

THIN SOLID FILMS, 2002, 402 (1-2) :302-306

[6] Atomic scale faceting and its effect on the grain size distribution of SnO2 thin films during deposition [J].

Jeong, J ;

Choi, SP ;

Hong, KJ ;

O, YT ;

Song, HJ ;

Koo, JB ;

Lee, IH ;

Park, JS ;

Shin, DC .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 110 (03) :240-242

[7]

Jeong J., 2011, J KOREAN PHYS SOC, V61, P943

[8] Effects of interface between SnO2 thin film and Si substrate on growth time [J].

Jeong, Jin ;

Na, Do-Sun ;

Lee, Bong-Ju ;

Song, Ho-Jun ;

Kim, Hyun-Goo .

CURRENT APPLIED PHYSICS, 2012, 12 (01) :303-306

[9] Fluoropolymer indium-tin-oxide buffer layers for improved power conversion in organic photovoltaics [J].

Kang, Bonan ;

Tan, L. W. ;

Silva, S. R. P. .

APPLIED PHYSICS LETTERS, 2008, 93 (13)

[10] Surface smoothing and roughening in sputtered SnO2 films [J].

Lindström, T ;

Isidorsson, J ;

Niklasson, GA .

THIN SOLID FILMS, 2001, 401 (1-2) :165-170

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