Tactile sensor array using microcantilever with nickel-chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection

被引：53

作者：

Sohgawa, Masayuki ^{[1
]}

Hirashima, Daiki ^{[1
]}

Moriguchi, Yusuke ^{[1
]}

Uematsu, Tatsuya ^{[1
]}

Mito, Wataru ^{[2
]}

Kanashima, Takeshi ^{[1
]}

Okuyama, Masanori ^{[1
]}

Noma, Haruo ^{[2
]}

机构：

[1] Osaka Univ, Toyonaka, Osaka 5608531, Japan

[2] Adv Telecommun Res Inst Int, Soura Ku, Kyoto 6190288, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 186卷

关键词：

Tactile sensor; Nickel chromium; Slippage detection; Microcantilever; Elastomer; Temperature coefficient of resistance;

D O I：

10.1016/j.sna.2011.12.055

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A tactile sensor consisting of microcantilevers has been fabricated using the NiCr-thin-film strain gauge with low noise by surface micromachining and the slippage has been detected by using the fabricated tactile sensor array. The NiCr alloy thin film of Cr: 75 wt% has very low temperature coefficient of resistance (TCR) and is employed to suppress the temperature noise and drift. The fabricated tactile sensor with the NiCr thin film (Cr: 75 wt%) has linear dependencies of the resistance on normal and shear forces, and shows lower noise and temperature drift than that with conventional NiCr (Cr: 20 wt%) film. Normal and shear forces measured by fabricated sensor well coincide with applied forces with errors of 3-3.5 kPa. Moreover, the gripping status of the robotic hand was detected by using fabricated tactile sensor array, and the slipping condition can be judged at the rate of 76.5%. A (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：32 / 37

页数：6

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