Surface Acoustic Wave Magnetic Sensor using Galfenol Thin Film

被引：43
|
作者：
Li, Weiyang [1 ]
Dhagat, Pallavi [1 ]
Jander, Albrecht [1 ]
机构：
[1] Oregon State Univ, Sch Elect Engn & Comp Sci, Corvallis, OR 97331 USA
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2012年 / 48卷 / 11期
基金：
美国国家科学基金会;
关键词：
Galfenol thin film; magnetic sensor; surface acoustic wave (SAW); FE-GA; ALLOYS;
D O I：
10.1109/TMAG.2012.2201928
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The performance of a surface acoustic wave (SAW) magnetic field sensor using galfenol (FeGa) thin film is investigated in this effort. We measure the change in the SAW velocity as a function of an externally applied magnetic field for galfenol films of varying thicknesses. A maximum change of 0.64%, greater than results reported for similar sensors, is obtained with a 500 nm thick film.
引用
收藏
页码：4100 / 4102
页数：3
相关论文
共 50 条
  • [1] Surface acoustic wave humidity sensor based on a thin PolyXIO film
    Tashtoush, NM
    Cheeke, JDN
    Eddy, N
    SENSORS AND ACTUATORS B-CHEMICAL, 1998, 49 (03) : 218 - 225
  • [2] Deposition of thin film using a surface acoustic wave device
    Murochi, Nobuaki
    Sugimoto, Mitsunori
    Matsui, Yoshikazu
    Kondoh, Jun
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (7B): : 4754 - 4759
  • [3] Integration of thin film giant magnetoimpedance sensor and surface acoustic wave transponder
    Li, Bodong
    Salem, Nedime Pelin M. H.
    Giouroudi, Ioanna
    Kosel, Juergen
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (07)
  • [4] Integration of thin film giant magnetoimpedance sensor and surface acoustic wave transponder
    Li, Bodong
    Salem, Nedime Pelin M. H.
    Giouroudi, Ioanna
    Kosel, Jrgen
    Journal of Applied Physics, 2012, 111 (07):
  • [5] Effect of Alumina Film on Surface Acoustic Wave Properties of ZnO Thin Film Surface Acoustic Wave Devices
    Shih, Wen-Ching
    Wang, Tzyy-Long
    Wang, Hui-Min
    Wu, Mu-Shiang
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (09)
  • [6] Development of surface acoustic wave magnetic field sensor incorporating with FeCo dot film
    Jia, Yana
    Wang, Wen
    Xue, Xufeng
    He, Shitang
    Liang, Yong
    2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,
  • [7] Surface acoustic wave sensor study of polyimide thin film surface treatments - effect on water uptake
    Galipeau, D.W.
    Story, P.R.
    Feger, C.
    Lee, K.-W.
    Journal of Adhesion Science and Technology, 1994, 8 (10 pt 1) : 1143 - 1156
  • [8] Using shear horizontal surface acoustic wave with polyaniline film as ammonia sensor
    Shen, YT
    Huang, CL
    Wu, L
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (4A): : 1844 - 1846
  • [9] Surface acoustic wave humidity sensor using polyvinyl-alcohol film
    Penza, M
    Anisimkin, VI
    SENSORS AND ACTUATORS A-PHYSICAL, 1999, 76 (1-3) : 162 - 166
  • [10] Surface acoustic wave humidity sensor using polyvinyl-alcohol film
    Penza, M
    Anisimkin, VI
    EUROSENSORS XII, VOLS 1 AND 2, 1998, : 125 - 128
12345