Nano fabrication of star structure for precision metrology developed by focused ion beam direct writing

被引：14

作者：

Xu, Zongwei ^{[1
]}

Fang, Fengzhou ^{[1
]}

Gao, Haifeng ^{[1
]}

Zhu, Yibo ^{[1
]}

Wu, Wei ^{[1
]}

Weckenmann, Albert ^{[2
]}

机构：

[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Ctr MicroNano Mfg Technol, Tianjin, Peoples R China

[2] Univ Erlangen Nurnberg, Chair Qual Management & Mfg Metrol, Erlangen, Germany

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2012年 / 61卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Metrology; Interferometry; Ion beam machining (IBM); MICROSCOPY;

D O I：

10.1016/j.cirp.2012.03.118

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The optimized design and nano fabrication of the star structures with continuous-variation spoke width are investigated in this study. Focused ion beam direct writing (FIBDW) technology is employed to fabricate the stars on various materials with an application-oriented design. The star center dimension and surface finish are minimized. The star structures with spoke's width ranging from 25 nm to 16 p.m and step height from 1 nm to 1 mu m are achieved precisely. optical microscopy, scanning probe microscopy and scanning electronic microscopy are used to test their measurement capabilities based on the developed star structures in lateral and longitudinal directions, respectively. (C) 2012 CIRP.

引用

页码：511 / 514

页数：4

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