A wireless AQP pressure sensor using chirped SAW delay lines structures

被引：0

作者：

Reindl, L ^{[1
]}

Ruppel, CCW ^{[1
]}

Riek, K ^{[1
]}

Pankratz, T ^{[1
]}

Weigel, R ^{[1
]}

机构：

[1] Siemens AG, Corp Technol, D-8000 Munich, Germany

来源：

1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2 | 1998年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We report of the design of a SAW delay line developed for a wireless pressure sensing system operating in the 434 MHz ISM-band. The structure is an one port configuration fabricated on quartz 37.5 degrees rotYX. It is hermetically sealed in all-quartz-package (APQ) technology with the SAW structure being placed on a diaphragm inside the cavity, The sensor allows for the measurement of absolute pressure values in the range from 0 to 8.5 bar. The SAW structure shows a linear phase although it incorporates chirped SAW components for enhancing the sensor sensitivity, The SAW structure is built up of two overlap-weighted dispersive split finger interdigital transducers (IDTs), An improvement of the sensor sensitivity by a factor of 32 compared to systems using non-dispersive SAW components has been achieved.

引用

页码：355 / 358

页数：4