Leakage current conduction behavior of fluorinated polyimide film

被引：0

作者：

Lee, YK ^{[1
]}

机构：

[1] Adonbest Technol Inc, W Vancouver, BC V7S 1C8, Canada

来源：

MODERN PHYSICS LETTERS B | 2006年 / 20卷 / 06期

关键词：

fluorinated polyimide; ULSI; capacitance voltage; leakage current; interlayer dielectric; Pool-Frenkel; RC delay;

D O I：

10.1142/S0217984906010676

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Leakage current of fluorinated polyimide film was measured as function of time, electric field and sample temperature. Several existing conduction and charge transport mechanism was fit to the experimental results. It was concluded that the bulk limited Pool-Prenkel conduction mechanism was likely to dominate for the leakage current at high electric field (higher than 1 MV/cm) and Ohmic conduction was main conduction mechanism at low electric field (lower than 1 MV/cm).

引用

页码：315 / 320

页数：6